Non-kinetic damage on insulating materials by highly charged ion bombardment

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 134, Issue 1, 1998, Pages 46-52

  Parks, D C ^a,b   Stockli M P ^b   Bell, E W ^c   Ratliff, L P ^a   Schmieder, R W ^d   Serpa, F G ^a,e   Gillaspy, J D ^a  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

^b KANSAS STATE UNIVERSITY   (United States)

^c Diamond Semiconductor Group   (United States)

^d SANDIA NATIONAL LABORATORIES   (United States)

^e UNIVERSITY OF NOTRE DAME   (United States)

Author keywords

AFM; Coulomb explosion; EBIS; EBIT; Highly charged ion; Surface damage

Indexed keywords

ATOMIC FORCE MICROSCOPY; ION BOMBARDMENT; MICA; RADIATION DAMAGE; SURFACE STRUCTURE;

COULOMB EXPLOSION; SURFACE TOPOGRAPHY;

ELECTRIC INSULATING MATERIALS;

EID: 0031675927     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(98)80032-3     Document Type: Article

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