Fabrication of nano-patterned sapphire substrates and their application to the improvement of the performance of GaN-based LEDs

Journal of Physics D: Applied Physics

Volumn 41, Issue 11, 2008, Pages

  Gao, Haiyong ^a   Yan, Fawang ^a   Zhang, Yang ^a   Li, Jinmin ^a   Zeng, Yiping ^a   Wang, Guohong ^a  

^a INSTITUTE OF SEMICONDUCTORS   (China)

Author keywords

[No Author keywords available]

Indexed keywords

GALLIUM NITRIDE; LIGHT EMITTING DIODES; METALLORGANIC CHEMICAL VAPOR DEPOSITION; MICROFABRICATION; WET ETCHING;

PLANAR SAPPHIRE SUBSTRATES;

SAPPHIRE;

EID: 44449161317     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/41/11/115106     Document Type: Article

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