Magnetic materials for three-dimensional damascene metallization: Void-free electrodeposition of Ni and Ni70Fe30 using 2-mercapto-5-benzimidazolesulfonic acid

Journal of the Electrochemical Society

Volumn 155, Issue 7, 2008, Pages

  Lee, Chang Hwa ^a,b   Bonevich, John E ^a   Davies, Joseph E ^a   Moffat, Thomas P ^a,b  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

^b ELECTROCHEMICAL SOCIETY

Author keywords

[No Author keywords available]

Indexed keywords

CARBOXYLIC ACIDS; CATALYST ACTIVITY; ELECTRODEPOSITION; ELECTROLYTES; METALLIZING; NICKEL ALLOYS;

AUTOCATALYTIC BREAKDOWN; DAMASCENE METALLIZATION; SUPERCONFORMAL FILLING; VOLTAMMETRIC RESPONSE;

SOFT MAGNETIC MATERIALS;

EID: 44349187560     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.2907433     Document Type: Article

References (42)

1. L. T. Romankiw, Electrochim. Acta, 42, 2985 (1997), and references therein.
2. C. A. Ross, Annu. Rev. Mater. Res., 31, 203 (2001), and references therein.
3. E. I. Cooper, C. Bongôte, J. Heidmann, Y. Hsu, P. Kern, J. W. Lam, M. Ramasubramanian, N. Robertson, L. T. Romankiw, and H. Xu, IBM J. Res. Dev., 49, 103 (2005).
4. T. Osaka, Electrochim. Acta, 45, 3311 (2000).
5. J. E. Lenz, Proc. IEEE, 78, 973 (1990).
6. R. S. Popovic, J. A. Flanagan, and P. A. Besse, Sens. Actuators, A, 56, 39 (1996).
7. J. W. Judy and R. S. Muller, Sens. Actuators, A, 53, 392 (1996).
8. S. S. P. Parkin, K. P. Roche, M. G. Samant, P. M. Rice, R. B. Beyers, R. E. Scheuerlein, E. J. O'Sullivan, S. L. Brown, J. Bucchigano, D. W. Abraham, J. Appl. Phys., 85, 5828 (1999).
9. C. C. Berry, J. Mater. Chem., 15, 543 (2005).
10. S. A. Wolf, A. Y. Chtchelkanova, and D. M. Treger, IBM J. Res. Dev., 50, 101 (2006).
11. S. S. P. Parkin, M. Hayashi, and L. Thomas, Science, 320, 190 (2008).
12. M. Baghbanan, U. Erb, and G. Palumbo, Phys. Status Solidi A, 203, 1259 (2006).
13. R. Rosenberg, D. C. Edelstein, C.-K. Hu, and K. P. Rodbell, Annu. Rev. Mater. Sci., 30, 229 (2000).
14. S. P. Murarka, Mater. Sci. Eng., R., 19, 87 (1997).
15. T. P. Moffat, D. Wheeler, M. Edelstein, and D. Josell, IBM J. Res. Dev., 49, 19 (2005).
16. T. P. Moffat, D. Wheeler, S.-K. Kim, and D. Josell, J. Electrochem. Soc., 153, C127 (2006).
17. B. Baker, C. Witt, D. Wheeler, D. Josell, and T. P. Moffat, Electrochem. Solid-State Lett., 6, C67 (2003).
18. D. Josell, D. Wheeler, and T. P. Moffat, J. Electrochem. Soc., 153, C11 (2006).
19. C. C. Roth and H. Leidheiser, J. Electrochem. Soc., 100, 553 (1953).
20. T. Osaka, T. Sawaguchi, F. Mizutani, T. Yokoshima, M. Takai, and Y. Okinaka, J. Electrochem. Soc., 146, 3295 (1999).
21. S. R. Brankovic, R. Haislmaier, and N. Vasiljevic, Electrochem. Solid-State Lett., 10, D67 (2007).
22. H. Kwon and A. A. Gewirth, J. Electrochem. Soc., 154, D577 (2007).
23. J. Edward and M. J. Levett, Trans. Inst. Met. Finish., 44, 27 (1966).
24. W. R. Doty and B. J. Riley, J. Electrochem. Soc., 114, 50 (1967).
25. G. T. Rogers, M. J. Ware, and R. V. Fellows, J. Electrochem. Soc., 107, 677 (1960).
26. R. F. Renner and K. C. Liddell, J. Appl. Electrochem., 32, 621 (2002).
27. U. S. Mohanty, B. C. Tripathy, S. C. Das, and V. N. Misra, Metall. Mater. Trans. B, 36B, 737 (2005).
28. J. Edwards and M. J. Levett, Trans. Inst. Met. Finish., 41, 157 (1964).
29. S. S. Kruglikov, N. T. Kudryavtsev, and R. P. Sobolev, Electrochim. Acta, 12, 1263 (1967).
30. A. Bodnevas and J. Zahavi, Plat. Surf. Finish., 81, 75 (1994).
31. I. Tabakovic, V. Inturi, and S. Riemer, J. Electrochem. Soc., 149, C18 (2002).
32. T. Osaka, M. Takai, Y. Sogawa, T. Momma, K. Ohashi, M. Satto, and K. Yamada, J. Electrochem. Soc., 146, 2092 (1999).
33. M. Saito, K. Yamada, K. Ohashi, Y. Yasue, Y. Sogawa, and T. Osaka, J. Electrochem. Soc., 146, 2845 (1999).
34. D. G. Foulke and O. Kardos, Proc. Am. Electroplat. Soc., 43, 172 (1956).
35. S. A. Watson and J. Edwards, Trans. Inst. Met. Finish., 34, 167 (1957).
36. A. T. Vagramyan and N. K. Baraboshkina, Plating, 54, 930 (1967).
37. S.-K. Kim, J. E. Bonevich, D. Josell, and T. P. Moffat, J. Electrochem. Soc., 154, D443 (2007).
38. D. Roha and U. Landau, J. Electrochem. Soc., 137, 824 (1990).
39. R. Chalupa, Y. Cao, and A. C. West, J. Appl. Electrochem., 32, 135 (2002).
40. C. Madore, M. Matlosz, and D. Landolt, J. Electrochem. Soc., 143, 3927 (1996).
41. C. Madore and D. Landolt, J. Electrochem. Soc., 143, 3936 (1996).
42. O. Kardos and D. Gardner Foulke, in Advances in Electrochemistry and Electrochemical Engineering, Vol. 2, p. 145-233, P. Delahay, and, C. W. Tobias, Editors, John Wiley & Sons, Hoboken, NJ (1962).