Magnetic neutral loop discharge (NLD) plasmas for surface processing

Journal of Physics D: Applied Physics

Volumn 41, Issue 8, 2008, Pages

  Uchida, Taijiro ^a   Hamaguchi, Satoshi ^b  

^a Osaka University ^*  (Japan)

^b OSAKA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRON CYCLOTRON RESONANCE; MAGNETIC FIELDS; MAGNETIC MATERIALS; OPTIMIZATION; PLASMA DENSITY; SURFACE PHENOMENA;

ELECTRON CONFINEMENT; NEUTRAL LOOP DISCHARGE (NLD); SURFACE PROCESSING;

PLASMAS;

EID: 42549101638     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/41/8/083001     Document Type: Review

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