A planar inductively coupled radio-frequency magnetic neutral loop discharge

Journal of Physics D: Applied Physics

Volumn 40, Issue 15, 2007, Pages 4508-4514

  Gans, T ^a,b   Crintea, D L ^a   O'Connell, D ^a   Czarnetzki, U ^a  

^a RUHR UNIVERSITY BOCHUM   (Germany)

^b QUEEN'S UNIVERSITY BELFAST   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

CARRIER CONCENTRATION; COAXIAL CABLES; ELECTRIC COILS; INDUCTIVELY COUPLED PLASMA; IONIZATION; MAGNETIC FIELD EFFECTS;

COAXIAL COILS; ELECTRON HEATING; MAGNETIC FIELD STRUCTURE; NEUTRAL LOOP (NL);

PLASMA DIAGNOSTICS;

EID: 34547417010     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/40/15/021     Document Type: Article

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