|
Volumn 40, Issue 11, 2001, Pages 6607-6612
|
Investigation of the conditions required for the formation of a magnetic neutral loop discharge plasma
a a a a a |
Author keywords
Electron behavior; Laser induced fluorescence; Neutral loop discharge; Optical emission spectroscopy; Processing plasma
|
Indexed keywords
ATOMS;
COMPUTER SIMULATION;
ELECTRIC FIELD EFFECTS;
ELECTRONS;
EMISSION SPECTROSCOPY;
FLUORESCENCE;
HEATING;
IONIZATION;
LASER APPLICATIONS;
MAGNETIC FIELD EFFECTS;
PLASMA COLLISION PROCESSES;
SPECTROSCOPIC ANALYSIS;
ELECTRON NEUTRAL COLLISION;
LASER INDUCED FLUORESCENCE SPECTROSCOPY;
MAGNETIC NEUTRAL LOOP DISCHARGE PLASMA;
OPTICAL EMISSION SPECTROSCOPY;
PLASMAS;
|
EID: 0036150547
PISSN: 00214922
EISSN: None
Source Type: Journal
DOI: 10.1143/jjap.40.6607 Document Type: Article |
Times cited : (15)
|
References (8)
|