Boundary characterization of MEMS structures through electro-mechanical testing

Sensors and Actuators, A: Physical

Volumn 143, Issue 2, 2008, Pages 415-422

  Rinaldi, G ^a   Packirisamy, M ^a   Stiharu, I ^a  

^a Gina Cody School of Engineering and Computer Science   (Canada)

Author keywords

AFM; Boundary support characterization; Electro mechanical testing; MEMS; Microfabrication; Rayleigh Ritz energy method

Indexed keywords

ATOMIC FORCE MICROSCOPY; BOUNDARY CONDITIONS; MICROFABRICATION; MICROSYSTEMS; PROBES;

BOUNDARY SUPPORT CHARACTERIZATION; ELECTRO MECHANICAL TESTING; MICROCANTILEVER PROBES; RAYLEIGH RITZ ENERGY METHOD;

MEMS;

EID: 41349086385     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2007.08.032     Document Type: Article

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