|
Volumn , Issue , 2002, Pages 83-86
|
Application of boundary conditioning to the synthesis of microsystems
|
Author keywords
[No Author keywords available]
|
Indexed keywords
ELECTROMECHANICAL DEVICES;
MEMS;
MICROMECHANICS;
BOUNDARY CONDITIONING;
DESIGN SYNTHESIS;
STATIC AND DYNAMIC BEHAVIORS;
SUPPORT CONDITIONS;
MICROSYSTEMS;
|
EID: 84963831127
PISSN: None
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1109/MEMSC.2001.992748 Document Type: Conference Paper |
Times cited : (8)
|
References (3)
|