Influence of micromachining on dynamic behaviour of MEMS structures

Canadian Journal of Electrical and Computer Engineering

Volumn 30, Issue 3, 2005, Pages 157-162

  Muthukumaran, P ^a   Stiharu, I ^a   Bhat, R B ^a  

^a Gina Cody School of Engineering and Computer Science   (Canada)

Author keywords

Boundary conditioning; Dynamic behaviour; MEMS; Micromechanical structures; Microsystems; Natural frequency shift

Indexed keywords

BOUNDARY CONDITIONING; DYNAMIC BEHAVIOR; MICROSYSTEMS TECHNOLOGY; NATURAL FREQUENCY SHIFT;

BOUNDARY CONDITIONS; COMMUNICATION SYSTEMS; DNA; FABRICATION; INFORMATION ANALYSIS; MICROELECTROMECHANICAL DEVICES; MICROELECTRONICS; MICROSTRUCTURE; NATURAL FREQUENCIES;

MICROMACHINING;

EID: 25444499968     PISSN: 08408688     EISSN: None     Source Type: Journal    
DOI: 10.1109/CJECE.2005.1541741     Document Type: Conference Paper

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