Optical MEMS based bimorph for thermal sensing

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5577, Issue PART 2, 2004, Pages 628-635

  Rinaldi, Gino ^a   Packirisamy, Muthukumaran ^a   Stiharu, Ion ^a  

^a Gina Cody School of Engineering and Computer Science   (Canada)

Author keywords

MEMS; Metal Bimorph; Thermal Characterization; Thermal Sensing

Indexed keywords

ACCELERATION; CHARACTERIZATION; GEOMETRY; OPTICAL DEVICES; OPTIMIZATION; PRESSURE EFFECTS; THERMAL EFFECTS;

MEMS; METAL-BIMORPH; THERMAL CHARACTERIZATION; THERMAL SENSING;

MICROELECTROMECHANICAL DEVICES;

EID: 21944434599     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.567508     Document Type: Conference Paper

References (7)

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3. Harald Sehr, et al., "Fabrication and test of thermal vertical bimorph actuators for movement in the wafer plane", Journal of Micromechanics and Microengineering, 11, PP 306-310, (2001)
4. Gino Rinaldi, Muthukumaran Packirisamy, and Ion Stiharu, "An improved method for predicting microfabrication influence in atomic force microscopy performances", Internatioal Journal of Nanotechnology, 1 (3), PP 292-306, (2004)
5. Gino Rinaldi, Muthukumaran Packirisamy, and Ion Stiharu, "Experimental investigation on the dynamics of MEMS structures", SPIE Conference Photonics Europe, 5455-8, Strasbourg, France, 26-30 April 2004
6. R. B. Bhat, "Natural frequencies of rectangular plates using characteristic orthogonal polynomials in Rayleigh-Ritz method" Journal of Sound and Vibration, 102 (4), PP 493-499, (1985)
7. Muthukumaran Packirisamy, et al., "Application of boundary conditioning to the synthesis of microsystems", 2001 Micro Electro Mechanical Systems Conference, PP 83-86, Berkeley, California, USA, 24-26 August 2001