Estimation of the Lyman- α line intensity in a lithium-based discharge-produced plasma source

Journal of Applied Physics

Volumn 103, Issue 1, 2008, Pages

  Masnavi, Majid ^a   Nakajima, Mitsuo ^a   Hotta, Eiki ^a   Horioka, Kazuhiko ^a  

^a TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EXTREME ULTRAVIOLET LITHOGRAPHY; LITHIUM; RADIATIVE TRANSFER; SPECTRUM ANALYSIS;

COLLISIONAL-RADIATIVE MODELS; LITHIUM PLASMA;

PLASMA SOURCES;

EID: 38149124879     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2827477     Document Type: Article

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