SCOPUS 정보 검색 플랫폼

Materials Research Society Symposium - Proceedings

Volumn 657, Issue , 2001, Pages EE5331-EE5336

Fabrication of MEMS components based on ultrananocrystalline diamond thin films and characterization of mechanical properties

(12) Sumant, A V a Auciello, O a Krauss, A R a Gruen, D M a Ersoy, D a Tucek, J a Jayatissa, A a Stach, E a Moldovan, N a Mancini, D a Busmann, H G a Meyer, E M a

a ARGONNE NATIONAL LABORATORY (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; DIAMOND FILMS; ELASTIC MODULI; GRAIN SIZE AND SHAPE; LITHOGRAPHY; MICROELECTROMECHANICAL DEVICES; SINGLE CRYSTALS; TRIBOLOGY;

ULTRANANOCRYSTALLINE DIAMOND (UNCD) FILMS;

ULTRATHIN FILMS;

EID: 0035556871 PISSN: 02729172 EISSN: None Source Type: Journal
DOI: None Document Type: Article

Times cited : (2)

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