In situ friction and wear measurements in integrated polysilicon mechanisms

Sensors and Actuators: A. Physical

Volumn 21, Issue 1-3, 1990, Pages 184-188

  Gabriel, K J ^a,b   Behi, F ^a,b   Mahadevan, R ^a,b   Mehregany, M ^a,b  

^a LUCENT TECHNOLOGIES   (United States)

^b MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

LASERS - APPLICATIONS; SEMICONDUCTING SILICON; WEAR OF MATERIALS;

POLYSILICON MECHANISMS; ROTATING MICROMECHANISMS;

MECHANISMS;

EID: 0025698150     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/0924-4247(90)85035-3     Document Type: Article

References (10)

1. IC-processed electrostatic micromotors
2. Laterally driven polysilicon resonant microstructures
3. Normally closed microvalve and micropump fabricated on a silicon wafer
4. Integrated fabrication of polysilicon mechanisms
5. Integrated movable micromechanical structures for sensors and actuators
6. Micro gears and turbines etched from silicon
7. Electric micromotors: electromechanical characteristics