Characterization of low-temperature ultrananocrystalline diamond RF MEMS resonators

35th European Microwave Conference 2005 - Conference Proceedings

Volumn 3, Issue , 2005, Pages 1523-1526

  Pacheco, Sergio P ^a   Zurcher, Peter ^a   Young, Steven R ^b   Weston, Don ^b   Dauksher, William J ^b   Auciello, Orlando ^c   Carlisle, John A ^c   Kane, Neil ^d   Birrell, James P ^d  

^a FREESCALE SEMICONDUCTOR INC   (United States)

^b MOTOROLA INC   (United States)

^c ARGONNE NATIONAL LABORATORY   (United States)

^d ADVANCED DIAMOND TECHNOLOGIES INC   (United States)

Author keywords

Acoustic velocity; Diamond; MEMS resonator; Resonant frequency; UNCD

Indexed keywords

ACOUSTIC WAVE VELOCITY; DIAMONDS; ELASTIC MODULI; LOW TEMPERATURE EFFECTS; MICROELECTROMECHANICAL DEVICES; NANOSTRUCTURED MATERIALS; NATURAL FREQUENCIES; THIN FILMS;

MEMS RESONATORS; RESONANT FREQUENCY; RESONANT FREQUENCY REPRODUCIBILITY; ULTRANANOCRYSTALLINE DIAMOND (UNCD);

CAVITY RESONATORS;

EID: 33847152668     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/EUMC.2005.1610241     Document Type: Conference Paper

References (10)

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