Columnar growth of ALN by r.f. magnetron sputtering: Role of the {1 0 1̄ 3} planes

Journal of Crystal Growth

Volumn 307, Issue 1, 2007, Pages 245-252

  Brien, V ^a   Miska, P ^b   Bolle, B ^c   Pigeat, P ^a  

^a CNRS   (France)

^b INSTITUT JEAN LAMOUR   (France)

^c UNIVERSITÉ PAUL VERLAINE METZ   (France)

Author keywords

A1. Crystal morphology; A1. Growth models; A1. Nanostructures; A3. Physical vapor deposition processes; B1. Nitrides; B2. Piezoelectric materials

Indexed keywords

CRYSTALLIZATION; MAGNETRON SPUTTERING; MORPHOLOGY; NANOSTRUCTURED MATERIALS; PHYSICAL VAPOR DEPOSITION; RADIO FREQUENCY AMPLIFIERS; SCANNING ELECTRON MICROSCOPY; TRANSMISSION ELECTRON MICROSCOPY;

COLUMNAR FILMS; CRYSTALLINE GROWTH; CRYSTALLOGRAPHIC INVESTIGATIONS; CRYSTALLOGRAPHIC TEXTURE; FIBER TEXTURE;

METALLIC FILMS;

EID: 34548178031     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jcrysgro.2007.06.013     Document Type: Article

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