Deposition of nanostructured titania films by particle-assisted MOCVD

Surface and Coatings Technology

Volumn 192, Issue 1, 2005, Pages 81-87

  Backman, Ulrika ^a   Auvinen, Ari ^a   Jokiniemi, Jorma K ^a  

^a VTT TECHNICAL RESEARCH CENTRE OF FINLAND   (Finland)

Author keywords

Atmospheric pressure; Nanostructure; Titania; Titanium tetraisopropoxide

Indexed keywords

ATMOSPHERIC PRESSURE; CHEMICAL VAPOR DEPOSITION; DIFFUSION; SCANNING; THERMOPHORESIS; THIN FILMS; TITANIUM; TRANSMISSION ELECTRON MICROSCOPY;

FILM MORPHOLOGY; FLOW REACTORS; NANOSIZED PARTICLES; TITANIUM TETRAISOPROPOXIDE (TTIP);

NANOSTRUCTURED MATERIALS;

NANOSTRUCTURE;

EID: 11344261785     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2004.03.003     Document Type: Article

References (23)

1. Goossens A. Maloney E.-L. Schoonman J. Chem. Vapor Depos. 4 3 1998 109
2. Kennedy M.K. Kruis F.E. Fissan H. Mehta B.R. Stappert S. Dumpich G. J. Appl. Phys. 93 1 2003 551
3. Xu N. Shi Z. Fan Y. Dong J. Shi J. Hu M. Z.-C. Ind. Eng. Chem. Res 38 1999 373
4. Kodas T.T. Hampden-Smith M.J. The Chemistry of Metal CVD 1994 VCH Weinheim
5. Wang C.-C. Zhang Z. Ying J.Y. Nanostruct. Mater. 9 1997 583
6. Martinelli G. Carotta M.C. Traversa E. Ghiotti G. MRS Bull. 24 6 1999 30
7. Gao L. Li Q. Song Z. Wang J. Sens. Actuators, B, Chem. 71 2000 179
8. Vydianathan K. Nuesca G. Peterson G. Eisenbraun E.T. Kaloyeros A.E. J. Mater. Res. 16 6 2001 1838
9. Richards B.S. Cotter J.E. Honsberg C.B. Wenham S.R. 28th IEEE PVSC 2000 (15-22 September) 375 IEEE Piscataway, NJ, USA
10. Shimogaki Y. Komiyama H. Chem. Lett. 1986 267
11. Babelon P. Dequiedt A.S. Mostéfa-Sba H. Bourgeois S. Sibillot P. Sacilotti M. Thin Solid Films 322 1998 63
12. Komiyama H. Kanai T. Inoue H. Chem. Lett. 1984 1283
13. Kirkbir F. Komiyama H. Can. J. Chem. Eng. 65 1987 759
14. Okuyama K. Kouska Y. Tohge N. Yamamoto S. Wu J.J. Flagan R.C. Seinfeld J.H. AIChE J. 32 12 1986 2010
15. Siefering K.L. Griffin G.L. J. Electrochem. Soc. 137 4 1990 1206
16. Pouilleau J. Devilliers D. Groult H. Marcus P. J. Mater. Sci. 32 1997 5645
17. Casaletto M.P. Ingo G.M. Kaciulis S. Mattogno G. Pandolfi L. Scavia G. Appl. Surf. Sci. 172 2001 167
18. Kaciulis S. Mattogno G. Napoli A. Bemporad E. Ferrari F. Montenero A. Gnappi G. J. Electron Spectrosc. 95 1998 61
19. Fictorie C.P. Evans J.F. Gladfelter W.L. J. Vac. Sci. Technol., A, Vac. Surf. Films 12 4 1994 1108
20. Collins J. Effects of homogeneous reaction on the chemical vapor deposition of titanium dioxide. PhD dissertation, Yale University, 1994.
21. Seifried S. Winterer M. Hahn H. Chem. Vapor Depos. 6 5 2000 239
22. Kodas T.T. Hampden-Smith M.J. Aerosol Processing of Materials 1999 Wiley-VCH New York
23. Okuyama K. Ushio R. Kousaka Y. Seinfeld J.H. Flagan R.C. Int. Chem. Eng 32 4 1992 750