Synthesis and microstructural characterisation of reactive RF magnetron sputtering AlN films for surface acoustic wave filters

Diamond and Related Materials

Volumn 13, Issue 4-8, 2004, Pages 1111-1115

  Assouar, M B ^a   El Hakiki, M ^a   Elmazria, O ^a   Alnot, P ^a   Tiusan, C ^b  

^a UNIVERSITÉ DE LORRAINE   (France)

^b INSTITUT JEAN LAMOUR   (France)

Author keywords

Aluminium nitride; Microstructure; Sputtering; Surface acoustic wave devices

Indexed keywords

ATOMIC FORCE MICROSCOPY; ELECTRON DIFFRACTION; MAGNETRON SPUTTERING; MICROSTRUCTURE; SCANNING ELECTRON MICROSCOPY; SILICON; SURFACE ROUGHNESS; SYNTHESIS (CHEMICAL); THIN FILMS; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION ANALYSIS;

COUPLING COEFFICIENT; PHASE VELOCITY; SURFACE ACOUSTIC WAVES (SAW);

ACOUSTIC SURFACE WAVE FILTERS;

DIAMOND;

EID: 2442505629     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.diamond.2003.11.064     Document Type: Article

References (16)

1. O'Clock G.D. Jr. Duffy M.T. Appl. Phys. Lett. 23 1973 55
2. Meinschen J. Behme G. Falk F. Stafast H. Appl. Phys. A 69 Suppl. 1 1999 683
3. Nyberg G.A. Buhrman R.A. J. Vac. Sci. Technol. A 2 1984 301
4. Kung P. Saxler A. Zhang X.et al. Appl. Phys. Lett. 66 1995 2958
5. Cheng C.C. Chen Y.C. Wang H.J. Chen W.R. Jap. J. Appl. Phys., Part 1 35 1996 1880
6. Meng W.J. Eesley G.L. Svinarich K.A. Phys. Rev. B 42 1990 4881
7. Cheng C.-C. Chen Y.-C. Horng R.-C. Wang H.-J. Chen W.-R. Lai E.-K. J. Vac. Sci. Technol. A 16 1998 3335
8. Okano H. Tanaka T. Shibata K. Jap. J. Appl. Phys. 31 1992 3017
9. Hwang B.-H. Chen C.-S. Lu H.-Y. Hsu T.-C. Mater. Sci. Eng. A 325 2002 380
10. Choi J.H. Lee J.Y. Kim J.H. Thin Solid Films 384 2001 166
11. Lim W.T. Son B.K. Kang D.H. Lee C.H. Thin Solid Films 382 2001 56
12. Cheng C.-C. Chen Y.-C. Horng R.-C. Wang H.-J. Chen W.-R. Lai E.-K. J. Vac. Sci. Technol. A 16 1998 3335
13. Jungnickel F. Fröhlich H.-J. Acoustics Ultrasonics Proc. 12th Eur. Conf. Eurosensors XII 1998 89-92
14. Elmazria O. Mortet V. El Hakiki M. Nesladek M. Alnot P. IEEE Trans. Ultrason. Ferroelect. Freq. Contr. 50/6 2003 710
15. Kagiwada R.S. Yen K.H. Lau K.F. IEEE Ultrason. Symp. Proc. 3 1978 598
16. Dischler B. Wild C. Low-Pressure Synthetic Diamond, Manufacturing and Applications 1998 Springer