Selective electroplating of copper lines on pre-patterned tantalum oxide thin films

Applied Surface Science

Volumn 253, Issue 22, 2007, Pages 8962-8968

  El Sayed, H ^a   Greiner, M T ^a   Kruse, P ^a  

^a MCMASTER UNIVERSITY   (Canada)

Author keywords

Copper; Electroplating; Lithography; Tantalum oxide

Indexed keywords

COPPER ALLOYS; LITHOGRAPHY; SEMICONDUCTOR MATERIALS; THIN FILMS;

DIRECT SELECTIVE METAL DEPOSITION; SCHOTTKY DEVICES; SELECTIVE COPPER ELECTRODEPOSITION; TANTALUM OXIDE;

ELECTROPLATING;

EID: 34547834209     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2007.05.014     Document Type: Article

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