Structural and electrical properties of tantalum oxide films grown by photo-assisted pulsed laser deposition

Applied Surface Science

Volumn 186, Issue 1-4, 2002, Pages 40-44

  Zhang, Jun Ying ^a,b   Boyd, Ian W ^a  

^a UNIVERSITY COLLEGE LONDON   (United Kingdom)

^b UNIVERSITY OF SCIENCE AND TECHNOLOGY OF CHINA   (China)

Author keywords

Dielectric; Excimer lamps; Photo assisted pulsed laser deposition; Ta 2 O 5

Indexed keywords

ATOMIC FORCE MICROSCOPY; ELLIPSOMETRY; EXCIMER LASERS; FILM GROWTH; FOURIER TRANSFORM INFRARED SPECTROSCOPY; LASER ABLATION; LEAKAGE CURRENTS; MICROSTRUCTURE; PULSED LASER DEPOSITION; QUARTZ; SILICON; SUBSTRATES; TANTALUM COMPOUNDS; ULTRAVIOLET SPECTROPHOTOMETERS;

PHOTO-ASSISTED PULSED LASER DEPOSITION (PHOTO-PLD);

THIN FILMS;

EID: 0037185196     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(01)00752-8     Document Type: Conference Paper

References (17)