Study of gradient stress in bimaterial cantilever structures for infrared applications

Journal of Micromechanics and Microengineering

Volumn 17, Issue 7, 2007, Pages 1211-1219

  Huang, Shusen ^a   Zhang, Xin ^a  

^a BOSTON UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ETCHING; RESIDUAL STRESSES; SILICON NITRIDE; STRESS ANALYSIS;

BIMATERIAL CANTILEVER STRUCTURES; FILM STRESS; GRADIENT STRESS; IMBALANCED RESIDUAL STRESS; INFRARED APPLICATIONS;

CANTILEVER BEAMS;

EID: 34547611138     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/17/7/001     Document Type: Article

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