Macro- and microstress analysis in sol-gel derived Pb(ZrxTi1 - X)O3 thin films

Journal of Applied Physics

Volumn 85, Issue 12, 1999, Pages 8023-8031

  Schafer J D ^a,b   Nafe H ^a   Aldinger, F ^a  

^a MAX PLANCK INSTITUTE FOR INTELLIGENT SYSTEMS   (Germany)

^b ATU GambH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ALGORITHMS; ALUMINUM; COMPOSITION EFFECTS; DOPING (ADDITIVES); LEAD COMPOUNDS; NIOBIUM; SOL-GELS; STRESS ANALYSIS; STRESS CONCENTRATION; SURFACE MEASUREMENT; THIN FILMS; X RAY DIFFRACTION ANALYSIS;

GRAZING INCIDENCE X RAY DIFFRACTION (GIXRD) METHOD; LEAD ZIRCONATE TITANATE; SURFACE PROFILOMETRY; WARREN-AVERBACH ALGORITHM;

DIELECTRIC FILMS;

EID: 0032621759     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.370638     Document Type: Article

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