Extension of the Stoney formula for film-substrate systems with gradient stress for MEMS applications

Journal of Micromechanics and Microengineering

Volumn 16, Issue 2, 2006, Pages 382-389

  Huang, Shusen ^a   Zhang, Xin ^a  

^a BOSTON UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; FILMS; FINITE ELEMENT METHOD; MULTILAYERS; STRAIN; STRESS ANALYSIS; SUBSTRATES; THIN FILMS;

FILM THICKNESS; FILM-SUBSTRATE STRUCTURES; POLYNOMIAL FUNCTION; STONEY FORMULA;

MICROELECTROMECHANICAL DEVICES;

EID: 31344467813     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/16/2/024     Document Type: Article

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