Modeling of elastic deformation of multilayers due to residual stresses and external bending

Journal of Applied Physics

Volumn 91, Issue 12, 2002, Pages 9652-9656

  Hsueh, Chun Hway ^a  

^a OAK RIDGE NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CLOSED FORM SOLUTIONS; FILM LAYERS; GENERAL SOLUTIONS; MISMATCH STRAIN; MULTIPLE LAYERS; THICK SUBSTRATES;

ELASTIC DEFORMATION; FILM PREPARATION; MULTILAYERS; STRESS CONCENTRATION;

RESIDUAL STRESSES;

EID: 0037098054     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1478137     Document Type: Article

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