Determination of pull-off forces of textured silicon surfaces by AFM force curve analysis

Journal of Micromechanics and Microengineering

Volumn 17, Issue 7, 2007, Pages 1326-1333

  Bachmann, Daniel ^a   Hierold, Christofer ^a  

^a ETH ZURICH   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; SILICON COMPOUNDS; SURFACE TREATMENT; VAN DER WAALS FORCES;

PULL-OFF FORCES; RIGID SILICON DISCS; SENSING ELEMENTS; TEXTURED SILICON SURFACES;

FORCE MEASUREMENT;

EID: 34547578504     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/17/7/015     Document Type: Article

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