Friction and pull-off force on silicon surface modified by FIB

Sensors and Actuators, A: Physical

Volumn 57, Issue 2, 1996, Pages 83-89

  Ando, Yasuhisa ^a   Jiro, Ino ^b,c  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

^b CHUO UNIVERSITY   (Japan)

^c KUBOTA CORPORATION   (Japan)

Author keywords

Atomic force microscope; Cyclic asperity; Focused ion beam; Friction force; Pull off force

Indexed keywords

ADHESION; ATOMIC FORCE MICROSCOPY; FRICTION; ION BEAMS; MICROELECTROMECHANICAL DEVICES; PROBES; SILICON; SURFACE PHENOMENA;

CYCLIC ASPERITY; FOCUSED ION BEAMS (FIB); PULL OFF FORCES;

SURFACE TREATMENT;

EID: 0030282355     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(97)80098-2     Document Type: Article

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