Adhesion characteristics of MEMS in microfluidic environments

Journal of Microelectromechanical Systems

Volumn 14, Issue 5, 2005, Pages 947-953

  Parker, Elizabeth E ^a   Ashurst, W Robert ^b,c   Carraro, Carlo ^b   Maboudian, Roya ^b  

^a HONEYWELL   (United States)

^b University of California   (United States)

^c AUBURN UNIVERSITY   (United States)

Author keywords

MEMS; Microfluidics; Monolayer coatings; Stiction

Indexed keywords

ADHESION; COATINGS; CRYSTAL MICROSTRUCTURE; FLUIDICS; HYDROCARBONS; HYDROPHOBICITY; MONOLAYERS; POLYCRYSTALLINE MATERIALS; POLYSILICON; SELF ASSEMBLY; STICTION; SURFACE PROPERTIES;

MICROFLUIDICS; MONOLAYER COATINGS; SELF-ASSEMBLED MONOLAYER (SAM);

MICROELECTROMECHANICAL DEVICES;

EID: 27644465191     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2005.851867     Document Type: Article

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