Microelectromechanical resonator manufactured using CMOS-MEMS technique

Microelectronics Journal

Volumn 38, Issue 6-7, 2007, Pages 672-677

  Dai, Ching Liang ^a   Kuo, Cheng Hsiung ^a   Chiang, Ming Chao ^a  

^a NATIONAL CHUNG HSING UNIVERSITY   (Taiwan)

Author keywords

CMOS; Microactuator; Micromechanical resonator

Indexed keywords

CAPACITANCE; CMOS INTEGRATED CIRCUITS; ELECTRIC POTENTIAL; MEMS; MICROACTUATORS; MICROELECTROMECHANICAL DEVICES;

CAPACITANCE VARIATION; CMOS-MEMS TECHNIQUE; DRIVING VOLTAGE; MICROMECHANICAL RESONATORS;

RESONATORS;

EID: 34547400093     PISSN: 00262692     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mejo.2007.05.008     Document Type: Article

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