Polycrystalline silicon-carbide surface-micromachined vertical resonators - Part II: Electrical testing and material property extraction

Journal of Microelectromechanical Systems

Volumn 14, Issue 3, 2005, Pages 579-589

  Wiser, Robert F ^a   Tabib Azar, Massood ^a   Mehregany, Mehran ^a   Zorman, Christian A ^a  

^a Case Western Reserve University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; ELASTIC MODULI; ELECTROSTATIC ACTUATORS; FILMS; MICROMACHINING; NATURAL FREQUENCIES; POLYCRYSTALLINE MATERIALS; POLYSILICON; RESIDUAL STRESSES; RESONATORS; SILICON CARBIDE; TESTING;

ATMOSPHERIC PRESSURE CHEMICAL VAPOR DEPOSITION; MICROMECHANICAL RESONATORS;

MICROELECTROMECHANICAL DEVICES;

EID: 22444446832     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2005.844748     Document Type: Article

References (18)

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