Laterally driven symmetric micro-resonator for gyroscopic applications

Journal of Micromechanics and Microengineering

Volumn 10, Issue 3, 2000, Pages 452-458

  Hong, Yoon Shik ^a   Lee, Jong Hyun ^b   Kim, Soo Hyun ^a  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

^b Gwangju Institute of Science and Technology (GIST)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

GYROSCOPES; MATHEMATICAL MODELS; NATURAL FREQUENCIES; RESONATORS; SENSITIVITY ANALYSIS; STIFFNESS; TUNING;

MICRO-RESONATORS; MICROGYROSCOPES;

MICROELECTROMECHANICAL DEVICES;

EID: 0034275334     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/10/3/322     Document Type: Article

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