Capacitive micromachined ultrasonic transducer (CMUT) arrays for medical imaging

Microelectronics Journal

Volumn 37, Issue 8, 2006, Pages 770-777

  Caronti, Alessandro ^a   Caliano, G ^a   Carotenuto, R ^a,c   Savoia, A ^a   Pappalardo, M ^a   Cianci, E ^b   Foglietti, V ^b  

^a ROMA TRE UNIVERSITY   (Italy)

^b IFN CNR   (Italy)

^c UNIVERSITY MEDITERRANEA OF REGGIO CALABRIA   (Italy)

Author keywords

Capacitive ultrasonic transducers (CMUTs); Medical imaging; MEMS; Micromachining

Indexed keywords

ARRAYS; BANDWIDTH; CAPACITANCE; ELECTROSTATICS; MICROMACHINING; OPTICAL FIBER FABRICATION; SILICON; ULTRASONIC TRANSDUCERS; ULTRASONICS;

CAPACITIVE ULTRASONIC TRANSDUCER (CMUT); FABRICATION TECHNOLOGY; MICROFABRICATION; SILICON-BASED ELECTROSTATIC TRANSDUCERS;

MEDICAL IMAGING;

EID: 33744517027     PISSN: 00262692     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mejo.2005.10.012     Document Type: Article

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