CMOS monolithic metal-oxide gas sensor microsystems

IEEE Sensors Journal

Volumn 6, Issue 2, 2006, Pages 276-286

  Barrettino, Diego ^a,b   Graf, Markus ^c   Taschini, Stefano ^a,c,d   Hafizovic, Sadik ^c,f   Hagleitner, Christoph ^c,e   Hierlemann, Andreas ^a,c  

^a IEEE   (United States)

^b University of Hawaii at Manoa   (United States)

^c ETH ZURICH   (Switzerland)

^d Unaxis Switzerland Ltd   (Switzerland)

^e IBM RESEARCH ZURICH   (Switzerland)

^f SWISS FEDERAL INSTITUTE OF TECHNOLOGY   (Switzerland)

Author keywords

CMOS based microsystem; MEMS; Metal oxide gas sensors; PID control

Indexed keywords

CMOS-BASED MICROSYSTEM; LOGARITHMIC CONVERTERS; MEMS; METAL-OXIDE GAS SENSORS; MICROHOTPLATES; PARTS-PER-MILLION; PROPORTIONAL-INTEGRAL-DERIVATIVE (PID) TEMPERATURE CONTROLLER;

CARBON MONOXIDE; CMOS INTEGRATED CIRCUITS; CONTROL SYSTEMS; MONOLITHIC INTEGRATED CIRCUITS;

SENSORS;

EID: 33645132852     PISSN: 1530437X     EISSN: None     Source Type: Journal    
DOI: 10.1109/JSEN.2006.870156     Document Type: Article

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