Contactless measurement of young's modulus using laser beam excitation and detection of vibration of thin-film microresonators

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 43, Issue 3, 2004, Pages 1178-1182

  Kobayashi, Toshihiro ^a   Ohsawa, Jun ^a   Hara, Tamio ^a   Yamaguchi, Naohiro ^a  

^a TOYOTA TECHNOLOGICAL INSTITUTE   (Japan)

Author keywords

Cantilever; Laser beam; Micromachining; Resonance frequency; Silicon; Thermal effect; Thin film; Vibration; Young's modulus

Indexed keywords

CANTILEVER BEAMS; ELASTIC MODULI; ERROR CORRECTION; EXCITONS; LASER BEAMS; MICROMACHINING; NATURAL FREQUENCIES; OPTICAL RESOLVING POWER; REACTIVE ION ETCHING; RESONATORS; SILICON; THERMAL EFFECTS; VIBRATIONS (MECHANICAL);

BULK MATERIALS; ELECTRICAL EXCITATION; MODULATED LASER INTENSITY; TENSILE TEST SYSTEM;

THIN FILMS;

EID: 2442499673     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/JJAP.43.1178     Document Type: Article

References (7)

1. K. Sato, M. Shikida, T. Yoshioka, T. Ando and T. Kawabata: Proc. Transducers'97, Chicago, 1997, p. 179.
2. T. Tsuchiya, O. Tabata, J. Sakata and Y. Taga: IEEE J. Microelectromech. Syst. 7 (1998) 106.
3. S. Venkatesh and B. Culshaw: Electron. Lett. 21 (1985) 315.
4. L. Kiesewetter, J.-M. Zhang, D. Houdeau and A. Steckenborn: Sens. Actual. A 35 (1992) 153.
5. T. Kobayashi, T. Hara, J. Ohsawa and N. Yamaguchi: Rev. Sci. Instrum. 73 (2002) 2651.
6. K. Komai, K. Minoshima, H. Tawara, S. Inoue and K. Sunako: Nihon Kikaigakkai Ronbunsyu A 60 (1994) 52 [in Japanese].
7. W. D. Nix: Metallurgical Transactions A 20A (1989) 2217.