-
1
-
-
10844253101
-
Silicon device scaling to the sub-10-nm regime
-
M. Ieong, B. Doris, J. Kedzierski, K. Rim, and M. Yang, "Silicon device scaling to the sub-10-nm regime," Science, vol. 306, pp. 2057-2060, 2004.
-
(2004)
Science
, vol.306
, pp. 2057-2060
-
-
Ieong, M.1
Doris, B.2
Kedzierski, J.3
Rim, K.4
Yang, M.5
-
2
-
-
26444457336
-
Physical limits of silicon transistors and circuits
-
R. W. Keyes, "Physical limits of silicon transistors and circuits," Reports in Progress in Physics, vol. 68, pp. 2701-2746, 2005.
-
(2005)
Reports in Progress in Physics
, vol.68
, pp. 2701-2746
-
-
Keyes, R.W.1
-
3
-
-
0033731870
-
Ultrathin oxide reliability for ULSI application
-
E. Wu, J. Stathis, and L. Han, "Ultrathin oxide reliability for ULSI application," Semiconductor Science and Technology, vol. 15, pp. 425, 2000.
-
(2000)
Semiconductor Science and Technology
, vol.15
, pp. 425
-
-
Wu, E.1
Stathis, J.2
Han, L.3
-
4
-
-
0036506478
-
A Future of Function or Failure
-
M. A. Alam, B. E. Weir, and P. J. Silverman, "A Future of Function or Failure," IEEE Electronics and Photonics Journal, vol. 18, pp. 42-48, 2002.
-
(2002)
IEEE Electronics and Photonics Journal
, vol.18
, pp. 42-48
-
-
Alam, M.A.1
Weir, B.E.2
Silverman, P.J.3
-
5
-
-
27644497020
-
Recent trends in reliability assessment of advanced CMOS technologies
-
G. Groeseneken, R. Degraeve, B. Kaczer, and P. Roussel, "Recent trends in reliability assessment of advanced CMOS technologies," Proc. of international Conference on Microelectronic Test Structures, vol. 18, pp. 5.1-5.8, 2005.
-
(2005)
Proc. of international Conference on Microelectronic Test Structures
, vol.18
-
-
Groeseneken, G.1
Degraeve, R.2
Kaczer, B.3
Roussel, P.4
-
8
-
-
0000637882
-
-
M. A. Alam, B. E. Weir, and P. J. Silverman, "Physics and prospects of sub-2nm oxides," vol. 2, pp. 365-373, 2000.
-
(2000)
Physics and prospects of sub-2nm oxides
, vol.2
, pp. 365-373
-
-
Alam, M.A.1
Weir, B.E.2
Silverman, P.J.3
-
9
-
-
0033750059
-
Gate oxide reliability projection to the sub-2 nm regime
-
B. E. Weir, M. A. Alam, J. D. Bude, P. J. Silverman, et al., "Gate oxide reliability projection to the sub-2 nm regime," Semiconductor Science and Technology, vol. 15, p. 455, 2000.
-
(2000)
Semiconductor Science and Technology
, vol.15
, pp. 455
-
-
Weir, B.E.1
Alam, M.A.2
Bude, J.D.3
Silverman, P.J.4
-
10
-
-
0036474952
-
A study of soft and hard breakdown - Part II: Principles of area, thickness, and voltage scaling
-
M. A. Alam, B. E. Weir, and P. J. Silverman, "A study of soft and hard breakdown - Part II: Principles of area, thickness, and voltage scaling," IEEE Trans. Electron Devices, vol. 49, pp. 239-246, 2002.
-
(2002)
IEEE Trans. Electron Devices
, vol.49
, pp. 239-246
-
-
Alam, M.A.1
Weir, B.E.2
Silverman, P.J.3
-
11
-
-
0036475491
-
A study of soft and hard breakdown - Part I: Analysis of statistical percolation conductance
-
M. A. Alam, B. E. Weir, and P. J. Silverman, "A study of soft and hard breakdown - Part I: Analysis of statistical percolation conductance," IEEE Trans. Electron Devices, vol. 49, pp. 232-238, 2002.
-
(2002)
IEEE Trans. Electron Devices
, vol.49
, pp. 232-238
-
-
Alam, M.A.1
Weir, B.E.2
Silverman, P.J.3
-
12
-
-
0037191844
-
Uncorrelated Breakdown in Silicon Integrated Circuits
-
M. A. Alam, R. K. Smith, B. E. Weir, and P. J. Silverman, "Uncorrelated Breakdown in Silicon Integrated Circuits," Nature, vol. 6914, pp. 378, 2002.
-
(2002)
Nature
, vol.6914
, pp. 378
-
-
Alam, M.A.1
Smith, R.K.2
Weir, B.E.3
Silverman, P.J.4
-
13
-
-
0036927324
-
-
M. A. Alam, R. K. Smith, B. E. Weir, and P. J. Silverman, Statistically Independent Soft-Breakdowns Redefine Oxide Reliability Specifications, presented at IEDM Tech. Dig., 2002.
-
M. A. Alam, R. K. Smith, B. E. Weir, and P. J. Silverman, "Statistically Independent Soft-Breakdowns Redefine Oxide Reliability Specifications," presented at IEDM Tech. Dig., 2002.
-
-
-
-
14
-
-
0036926527
-
-
J. Sune and E. Wu, Statistics of Successive Breakdown Events for Ultrathin Gate Oxides, presented at IEDM Tech. Dig., 2002.
-
J. Sune and E. Wu, "Statistics of Successive Breakdown Events for Ultrathin Gate Oxides," presented at IEDM Tech. Dig., 2002.
-
-
-
-
15
-
-
0036475351
-
SILC as a measure of trap generation and predictor of T-BD in ultrathin oxides
-
M. A. Alam, "SILC as a measure of trap generation and predictor of T-BD in ultrathin oxides," IEEE Trans. Electron Devices, vol. 49, pp. 226-231, 2002.
-
(2002)
IEEE Trans. Electron Devices
, vol.49
, pp. 226-231
-
-
Alam, M.A.1
-
16
-
-
0036931973
-
A new model of time evolution of gate leakage current after soft breakdown in ultra-thin gate oxides
-
H. Hosoi, P. L. Re, Y. Kamakura, and K. Taniguchi, "A new model of time evolution of gate leakage current after soft breakdown in ultra-thin gate oxides," IEDM Tech. Dig., pp. 155-158, 2002.
-
(2002)
IEDM Tech. Dig
, pp. 155-158
-
-
Hosoi, H.1
Re, P.L.2
Kamakura, Y.3
Taniguchi, K.4
-
17
-
-
0038782425
-
A thorough investigation of progressive breakdown in ultra-thin oxides. Physical understanding and application for industrial reliability assessment
-
F. Monsieur and e. al, "A thorough investigation of progressive breakdown in ultra-thin oxides. Physical understanding and application for industrial reliability assessment," Proc. IEEE Int. Reliability Physics Symp., pp. 45-54, 2002.
-
(2002)
Proc. IEEE Int. Reliability Physics Symp
, pp. 45-54
-
-
Monsieur, F.1
al, E.2
-
18
-
-
35548983287
-
A phenomelogical theory of correlated multiple soft-breakdown events in ultra-thin gate dielectrics
-
M. A. Alam and R. K. Smith, "A phenomelogical theory of correlated multiple soft-breakdown events in ultra-thin gate dielectrics," Proc. IEEE Int. Reliability Physics Symp., pp. 406-411, 2003.
-
(2003)
Proc. IEEE Int. Reliability Physics Symp
, pp. 406-411
-
-
Alam, M.A.1
Smith, R.K.2
-
19
-
-
59949096250
-
Relation between breakdown mode and the breakdown location in short channel NMOSFET and its impact on reliability specification
-
R. Degraeve, B. Kaczer, A. Keersgeiter, and G. Groeseneken, "Relation between breakdown mode and the breakdown location in short channel NMOSFET and its impact on reliability specification," Proc. IEEE Int. Reliability Physics Symp., pp. 360-366, 2001.
-
(2001)
Proc. IEEE Int. Reliability Physics Symp
, pp. 360-366
-
-
Degraeve, R.1
Kaczer, B.2
Keersgeiter, A.3
Groeseneken, G.4
-
20
-
-
15744387123
-
Detailed study and projection of hard breakdown evolution in ultra-thin gate oxides
-
J. Suehle, B. Zhu, Y. Chen, J. B. Bernstein, and e. al., "Detailed study and projection of hard breakdown evolution in ultra-thin gate oxides," Microelect. Reliability, pp. 419, 2005.
-
(2005)
Microelect. Reliability
, pp. 419
-
-
Suehle, J.1
Zhu, B.2
Chen, Y.3
Bernstein, J.B.4
al, E.5
-
21
-
-
0035498765
-
Soft breakdown at all positions along the N-MOSFET
-
B. E. Weir, M. A. Alam, and P. J. Silverman, "Soft breakdown at all positions along the N-MOSFET," Microelectronic Engineering, vol. 59, pp. 17-23, 2001.
-
(2001)
Microelectronic Engineering
, vol.59
, pp. 17-23
-
-
Weir, B.E.1
Alam, M.A.2
Silverman, P.J.3
-
22
-
-
34250680415
-
Theory of "Current-Ratio" method for oxide reliability: Proposal and validation of a new class of two-dimensional breakdown spot characterization techniques
-
M. A. Alam, D. Monroe, B. E. Weir, and P. J. Silverman, "Theory of "Current-Ratio" method for oxide reliability: Proposal and validation of a new class of two-dimensional breakdown spot characterization techniques," IEDM Tech. Dig., pp. 415-418, 2005.
-
(2005)
IEDM Tech. Dig
, pp. 415-418
-
-
Alam, M.A.1
Monroe, D.2
Weir, B.E.3
Silverman, P.J.4
-
24
-
-
0026118697
-
The statistical distribution of breakdown from multiple breakdown events in one samples
-
E. Farres, M. Nafria, J. Sune, and X. Aymerich, "The statistical distribution of breakdown from multiple breakdown events in one samples," Journal of Physics D: Applied Physics, vol. 24, pp. 407-414, 1991.
-
(1991)
Journal of Physics D: Applied Physics
, vol.24
, pp. 407-414
-
-
Farres, E.1
Nafria, M.2
Sune, J.3
Aymerich, X.4
-
25
-
-
84932128326
-
A methodology for accurate assessment of soft-broken gate oxide leakage and the reliability of VLSI circuits
-
P. W. Mason, A. J. L. Duca, C. H. Holder, M. A. Alam, and D. K. Hwang, "A methodology for accurate assessment of soft-broken gate oxide leakage and the reliability of VLSI circuits," Proc. IEEE Int. Reliability Physics Symp., pp. 430-434, 2004.
-
(2004)
Proc. IEEE Int. Reliability Physics Symp
, pp. 430-434
-
-
Mason, P.W.1
Duca, A.J.L.2
Holder, C.H.3
Alam, M.A.4
Hwang, D.K.5
-
26
-
-
0033339638
-
Experimental examination of physical model for direct tunneling current in unstressed/stressed ultrathin oxides
-
S.-I. Takagi, M. Takayanagi, and A. Toriumi, "Experimental examination of physical model for direct tunneling current in unstressed/stressed ultrathin oxides," IEDM Tech. Dig., pp. 461-464, 1999.
-
(1999)
IEDM Tech. Dig
, pp. 461-464
-
-
Takagi, S.-I.1
Takayanagi, M.2
Toriumi, A.3
-
27
-
-
0030399672
-
Experimental evidence of inelastic tunneling and new I-V model for stressed induced leakage current
-
S.-I. Takagi, N. Yasuda, and A. Toriumi, "Experimental evidence of inelastic tunneling and new I-V model for stressed induced leakage current," IEDM Tech. Dig., pp. 323-326, 1996.
-
(1996)
IEDM Tech. Dig
, pp. 323-326
-
-
Takagi, S.-I.1
Yasuda, N.2
Toriumi, A.3
-
28
-
-
0033741528
-
Experimental evidence for voltage driven breakdown models in ultrathin gate oxides
-
P. Nicollian, W. Hunter, and J. Hu, "Experimental evidence for voltage driven breakdown models in ultrathin gate oxides," Proc. IEEE Int. Reliability Physics Symp., pp. 7-15, 2000.
-
(2000)
Proc. IEEE Int. Reliability Physics Symp
, pp. 7-15
-
-
Nicollian, P.1
Hunter, W.2
Hu, J.3
-
29
-
-
0033716148
-
TBD prediction from measurement at low field and room temperature using a new estimator
-
A. Ghetti, J. D. Bude, and G. Weber, "TBD prediction from measurement at low field and room temperature using a new estimator," Proc. Symp. VLSI Technology, pp. 219-220, 2000.
-
(2000)
Proc. Symp. VLSI Technology
, pp. 219-220
-
-
Ghetti, A.1
Bude, J.D.2
Weber, G.3
-
30
-
-
0002604585
-
Defect generation and reliability of ultrathin SiO2 at low voltage
-
J. H. Stathis and D. J. DiMaria, "Defect generation and reliability of ultrathin SiO2 at low voltage," Proc. of Electro Chemical Society, vol. 2, pp. 33-44, 2000.
-
(2000)
Proc. of Electro Chemical Society
, vol.2
, pp. 33-44
-
-
Stathis, J.H.1
DiMaria, D.J.2
-
31
-
-
25844523388
-
Low voltage gate dielectric reliability
-
B. E. Weir, M. A. Alam, P. J. Silverman, and Y. Ma, "Low voltage gate dielectric reliability," Proc. of Electro Chemical Society, vol. 2, pp. 465-474, 2002.
-
(2002)
Proc. of Electro Chemical Society
, vol.2
, pp. 465-474
-
-
Weir, B.E.1
Alam, M.A.2
Silverman, P.J.3
Ma, Y.4
-
32
-
-
0036539453
-
Physical analysis of hard and soft breakdown failures in ultrathin gate oxides
-
M. K. Radhakrishnan, K. L. Pey, C. H. Tung, and W. H. Lin, "Physical analysis of hard and soft breakdown failures in ultrathin gate oxides," Microelectronics Reliability, vol. 42, pp. 565-571, 2002.
-
(2002)
Microelectronics Reliability
, vol.42
, pp. 565-571
-
-
Radhakrishnan, M.K.1
Pey, K.L.2
Tung, C.H.3
Lin, W.H.4
-
33
-
-
10044266222
-
A comprehensive model of PMOS NBTI degradation
-
M. A. Alam and S. Mahapatra, "A comprehensive model of PMOS NBTI degradation," Microelectronics Reliability, vol. 45, pp. 71-81, 2005.
-
(2005)
Microelectronics Reliability
, vol.45
, pp. 71-81
-
-
Alam, M.A.1
Mahapatra, S.2
-
34
-
-
0041340533
-
Negative Bias Temperature Instability: Road to cross in deep submicron silicon semiconductor manufacturing
-
D. K. Schroeder and J. A. Babcock, "Negative Bias Temperature Instability: road to cross in deep submicron silicon semiconductor manufacturing," J. Appl. Phys., vol. 94, pp. 1-18, 2003.
-
(2003)
J. Appl. Phys
, vol.94
, pp. 1-18
-
-
Schroeder, D.K.1
Babcock, J.A.2
-
35
-
-
0842309776
-
-
S. Rangan, N. Mielke, and E. C. Yeh, Universal recovery behavior of negative bias temperature instability, IEDM Tech. Dig., pp. 14.3.1-14.3.4, 2003.
-
S. Rangan, N. Mielke, and E. C. Yeh, "Universal recovery behavior of negative bias temperature instability," IEDM Tech. Dig., pp. 14.3.1-14.3.4, 2003.
-
-
-
-
36
-
-
34250666876
-
-
C. R. Parthasarathy, M. Denais, V. Huard, G. Ribes, E. Vincent, and A. Bravaix, New insights into recovery characteristics of post NBT stress, Proc. IEEE Int. Reliability Physics Symp., pp. 5A.6, 2006.
-
C. R. Parthasarathy, M. Denais, V. Huard, G. Ribes, E. Vincent, and A. Bravaix, "New insights into recovery characteristics of post NBT stress," Proc. IEEE Int. Reliability Physics Symp., pp. 5A.6, 2006.
-
-
-
-
37
-
-
0842266651
-
A critical examination of the mechanics of dynamic NBTI for pMOSFETs
-
M. A. Alam, "A critical examination of the mechanics of dynamic NBTI for pMOSFETs," IEDM Tech. Dig., pp. 346-349, 2003.
-
(2003)
IEDM Tech. Dig
, pp. 346-349
-
-
Alam, M.A.1
-
38
-
-
0017493207
-
Negative bias stress of MOS devices at high electric fields and degradation of MOS devices
-
K. O. Jeppsen and C. M. Svensson, "Negative bias stress of MOS devices at high electric fields and degradation of MOS devices," J. Appl. Phys., vol. 48, pp. 2004-2014, 1977.
-
(1977)
J. Appl. Phys
, vol.48
, pp. 2004-2014
-
-
Jeppsen, K.O.1
Svensson, C.M.2
-
39
-
-
4444341905
-
Investigation and modeling of interface and bulk trap generation during negative bias temperature instability of p-MOSFETs
-
S. Mahapatra, P. B. Kumar, and M. A. Alam, "Investigation and modeling of interface and bulk trap generation during negative bias temperature instability of p-MOSFETs," IEEE Trans. Electron Devices, vol. 51, pp. 1371-1379, 2004.
-
(2004)
IEEE Trans. Electron Devices
, vol.51
, pp. 1371-1379
-
-
Mahapatra, S.1
Kumar, P.B.2
Alam, M.A.3
-
40
-
-
21644455928
-
On-the-fly characterization of NBTI in ultra-thin gte oxide PMOSFETs
-
M. Denais, A. Bravaix, V. Huard, C. Parthasarathy, G. Ribes, F. Pirrier, V. Rey-Tauriac, and N. Revil, "On-the-fly characterization of NBTI in ultra-thin gte oxide PMOSFETs," IEDM Tech. Dig., pp. 109-112, 2004.
-
(2004)
IEDM Tech. Dig
, pp. 109-112
-
-
Denais, M.1
Bravaix, A.2
Huard, V.3
Parthasarathy, C.4
Ribes, G.5
Pirrier, F.6
Rey-Tauriac, V.7
Revil, N.8
-
41
-
-
13444309341
-
Interface trap generation and hole trapping under NBTI and PBTI in advanced CMOS technology with a 2-nm gate oxide
-
M. Denais, V. Huard, C. Parthasarathy, et al., "Interface trap generation and hole trapping under NBTI and PBTI in advanced CMOS technology with a 2-nm gate oxide," Ieee Trans. Dev. Mater. Reliability, vol. 4, pp. 715-722, 2004.
-
(2004)
Ieee Trans. Dev. Mater. Reliability
, vol.4
, pp. 715-722
-
-
Denais, M.1
Huard, V.2
Parthasarathy, C.3
-
42
-
-
27744444546
-
Fast DNBTI Components in p-MOSFET With SiON Dielectric
-
T. Yang, C. Shen, M. F. Li et al., "Fast DNBTI Components in p-MOSFET With SiON Dielectric," IEEE Electron Devices Lett., vol. 35, pp. 826-828, 2005.
-
(2005)
IEEE Electron Devices Lett
, vol.35
, pp. 826-828
-
-
Yang, T.1
Shen, C.2
Li, M.F.3
-
43
-
-
34250650732
-
-
N. K. Jha, P. S. Reddy, and V. R. Rao, A new drain voltage enhanced NBTI degradation mechanism, Proc. IEEE Int. Reliability Physics Symp., pp. 5C.1, 2004.
-
N. K. Jha, P. S. Reddy, and V. R. Rao, "A new drain voltage enhanced NBTI degradation mechanism," Proc. IEEE Int. Reliability Physics Symp., pp. 5C.1, 2004.
-
-
-
|