메뉴 건너뛰기




Volumn 101, Issue 9, 2007, Pages

High-resolution stress assessments of interconnect/dielectric electronic patterns using optically active point defects of silica glass as a stress sensor

Author keywords

[No Author keywords available]

Indexed keywords

CATHODOLUMINESCENCE; DIELECTRIC PROPERTIES; OPTICAL VARIABLES CONTROL; POINT DEFECTS; RESIDUAL STRESSES; STRESS ANALYSIS;

EID: 34248531495     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2723193     Document Type: Conference Paper
Times cited : (25)

References (50)
  • 2
    • 0001613321 scopus 로고    scopus 로고
    • 0021-8979 10.1063/1.1289044
    • S. Chiras and D. R. Clarke, J. Appl. Phys. 0021-8979 10.1063/1.1289044 88, 6302 (2000).
    • (2000) J. Appl. Phys. , vol.88 , pp. 6302
    • Chiras, S.1    Clarke, D.R.2
  • 3
    • 33745905893 scopus 로고
    • 0021-8979 10.1063/1.349282
    • S. M. Hu, J. Appl. Phys. 0021-8979 10.1063/1.349282 70, R53 (1991).
    • (1991) J. Appl. Phys. , vol.70 , pp. 53
    • Hu, S.M.1
  • 6
    • 0037152692 scopus 로고    scopus 로고
    • 0022-3727 10.1088/0022-3727/35/20/101
    • H. J. Peng, S. P. Wong, and S. Zhao, J. Phys. D 0022-3727 10.1088/0022-3727/35/20/101 35, L95 (2002).
    • (2002) J. Phys. D , vol.35 , pp. 95
    • Peng, H.J.1    Wong, S.P.2    Zhao, S.3
  • 9
    • 0030081591 scopus 로고    scopus 로고
    • 0268-1242 10.1088/0268-1242/11/2/001
    • I. De Wolf, Semicond. Sci. Technol. 0268-1242 10.1088/0268-1242/11/2/001 11, 139 (1996).
    • (1996) Semicond. Sci. Technol. , vol.11 , pp. 139
    • De Wolf, I.1
  • 18
    • 0017935789 scopus 로고
    • 0021-8979 10.1063/1.324682
    • L. Grabner, J. Appl. Phys. 0021-8979 10.1063/1.324682 49, 580 (1978).
    • (1978) J. Appl. Phys. , vol.49 , pp. 580
    • Grabner, L.1
  • 19
    • 0028382718 scopus 로고
    • 0002-7820 10.1111/j.1151-2916.1994.tb06996.x
    • Q. Ma and D. R. Clarke, J. Am. Ceram. Soc. 0002-7820 10.1111/j.1151-2916. 1994.tb06996.x 77, 298 (1994).
    • (1994) J. Am. Ceram. Soc. , vol.77 , pp. 298
    • Ma, Q.1    Clarke, D.R.2
  • 20
    • 0032183115 scopus 로고    scopus 로고
    • 0022-3093 10.1016/S0022-3093(98)00720-0
    • L. Skuja, J. Non-Cryst. Solids 0022-3093 10.1016/S0022-3093(98)00720-0 239, 16 (1998).
    • (1998) J. Non-Cryst. Solids , vol.239 , pp. 16
    • Skuja, L.1
  • 21
    • 0028764522 scopus 로고
    • 0022-3093 10.1016/0022-3093(94)90684-X
    • L. Skuja, J. Non-Cryst. Solids 0022-3093 10.1016/0022-3093(94)90684-X 179, 51 (1994).
    • (1994) J. Non-Cryst. Solids , vol.179 , pp. 51
    • Skuja, L.1
  • 25
    • 0019003192 scopus 로고
    • 0021-8979 10.1063/1.327846
    • H. Koyama, J. Appl. Phys. 0021-8979 10.1063/1.327846 51, 2228 (1980).
    • (1980) J. Appl. Phys. , vol.51 , pp. 2228
    • Koyama, H.1
  • 28
    • 25044460648 scopus 로고
    • 0163-1829 10.1103/PhysRevB.22.4192
    • D. L. Griscom, Phys. Rev. B 0163-1829 10.1103/PhysRevB.22.4192 22, 4192 (1980).
    • (1980) Phys. Rev. B , vol.22 , pp. 4192
    • Griscom, D.L.1
  • 31
    • 0019573105 scopus 로고
    • 0031-8965 10.1002/pssa.2210650231
    • C. Donolato, Phys. Status Solidi A 0031-8965 10.1002/pssa.2210650231 65, 649 (1981).
    • (1981) Phys. Status Solidi A , vol.65 , pp. 649
    • Donolato, C.1
  • 34
    • 0011086113 scopus 로고
    • 0022-3727 10.1088/0022-3727/5/1/308
    • K. Kanaya and S. Okayama, J. Phys. D 0022-3727 10.1088/0022-3727/5/1/308 5, 43 (1972).
    • (1972) J. Phys. D , vol.5 , pp. 43
    • Kanaya, K.1    Okayama, S.2
  • 35
    • 84985162753 scopus 로고
    • 0002-7820 10.1111/j.1151-2916.1990.tb06454.x
    • J. Rödel, J. Kelly, and B. R. Lawn, J. Am. Ceram. Soc. 0002-7820 10.1111/j.1151-2916.1990.tb06454.x 73, 3313 (1990).
    • (1990) J. Am. Ceram. Soc. , vol.73 , pp. 3313
    • Rödel, J.1    Kelly, J.2    Lawn, B.R.3
  • 45
    • 34248566507 scopus 로고    scopus 로고
    • MATHEMATICA 5.0, Wolfram Research, Inc., Champaign, IL.
    • MATHEMATICA 5.0, Wolfram Research, Inc., Champaign, IL.
  • 47
    • 0002205423 scopus 로고
    • 0003-6951 10.1063/1.89840
    • S. M. Hu, Appl. Phys. Lett. 0003-6951 10.1063/1.89840 32, 5 (1978).
    • (1978) Appl. Phys. Lett. , vol.32 , pp. 5
    • Hu, S.M.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.