Analytic solution of stress distribution under a thin film edge in substrates

Applied Physics Letters

Volumn 79, Issue 11, 2001, Pages 1628-1630

  Wong, S P ^a   Peng, H J ^a   Zhao, Shounan ^b  

^a CHINESE UNIVERSITY OF HONG KONG   (Hong Kong)

^b SOUTH CHINA UNIVERSITY OF TECHNOLOGY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0035839823     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1404130     Document Type: Article

References (12)

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