메뉴 건너뛰기




Volumn 54, Issue 5, 2007, Pages 1076-1082

Study of the drain leakage current in bottom-gated nanocrystalline silicon thin-film transistors by conduction and low-frequency noise measurements

Author keywords

Bottom gated thin film transistors (TFTs); Leakage current; Nanocrystalline silicon (nc Si); Noise

Indexed keywords

DRAIN CURRENT; ELECTRIC FIELDS; GATES (TRANSISTOR); GRAIN BOUNDARIES; LEAKAGE CURRENTS; NANOCRYSTALLINE SILICON;

EID: 34247869858     PISSN: 00189383     EISSN: None     Source Type: Journal    
DOI: 10.1109/TED.2007.893607     Document Type: Article
Times cited : (17)

References (26)
  • 2
    • 0000403217 scopus 로고    scopus 로고
    • T. W. Little, K. Takahara, H. Koike, T. Nakazawa, I. Yadasaka, and H. Ohshima, Low temperature poly-Si TFTs using solid phase crystallization of very thin films and an electron cyclotron resonance chemical vapor deposition gate insulator, Jpn. J. Appl. Phys., 30, pt. 1, no. 12B, pp. 3724-3728, Dec. 1991.
    • T. W. Little, K. Takahara, H. Koike, T. Nakazawa, I. Yadasaka, and H. Ohshima, "Low temperature poly-Si TFTs using solid phase crystallization of very thin films and an electron cyclotron resonance chemical vapor deposition gate insulator," Jpn. J. Appl. Phys., vol. 30, pt. 1, no. 12B, pp. 3724-3728, Dec. 1991.
  • 3
    • 0024753175 scopus 로고
    • XeCl excimer laser annealing used to fabricate poly-Si TFT's
    • Oct
    • T. Sameshima, M. Hara, and S. Usui, "XeCl excimer laser annealing used to fabricate poly-Si TFT's," Jpn. J. Appl. Phys., vol. 28, pt. 1, no. 10, pp. 1789-1973, Oct. 1989.
    • (1989) Jpn. J. Appl. Phys , vol.28 , Issue.10 PART. 1 , pp. 1789-1973
    • Sameshima, T.1    Hara, M.2    Usui, S.3
  • 5
    • 0028517842 scopus 로고
    • Characteristics of polycrystalline-Si thin-film transistors fabricated by excimer laser annealing method
    • Oct
    • N. Kubo, N. Kusumoto, T. Inushima, and S. Yamazaki "Characteristics of polycrystalline-Si thin-film transistors fabricated by excimer laser annealing method," IEEE Trans. Electron Devices, vol. 41, no. 10, pp. 1876-1879, Oct. 1994.
    • (1994) IEEE Trans. Electron Devices , vol.41 , Issue.10 , pp. 1876-1879
    • Kubo, N.1    Kusumoto, N.2    Inushima, T.3    Yamazaki, S.4
  • 6
    • 0000553102 scopus 로고    scopus 로고
    • Effect of excimer laser annealing on the structural and electrical properties of polycrystalline silicon thin-film transistors
    • Oct
    • C. T. Angelis, C. A. Dimitriadis, M. Miyasaka, F. V. Farmakis, G. Kamarinos, J. Brini, and J. Stoemenos, "Effect of excimer laser annealing on the structural and electrical properties of polycrystalline silicon thin-film transistors," J. Appl. Phys., vol. 86, no. 8, pp. 4600-4606, Oct. 1999.
    • (1999) J. Appl. Phys , vol.86 , Issue.8 , pp. 4600-4606
    • Angelis, C.T.1    Dimitriadis, C.A.2    Miyasaka, M.3    Farmakis, F.V.4    Kamarinos, G.5    Brini, J.6    Stoemenos, J.7
  • 7
    • 0035366275 scopus 로고    scopus 로고
    • An investigation of laser annealed and metal-induced crystallized polycrystalline silicon thin-film transistors
    • Jun
    • D. Murley, N. Young, M. Trainor, and D. McCulloch, "An investigation of laser annealed and metal-induced crystallized polycrystalline silicon thin-film transistors," IEEE Trans. Electron Devices, vol. 48, no. 6, pp. 1145-1151, Jun. 2001.
    • (2001) IEEE Trans. Electron Devices , vol.48 , Issue.6 , pp. 1145-1151
    • Murley, D.1    Young, N.2    Trainor, M.3    McCulloch, D.4
  • 8
    • 0030128485 scopus 로고    scopus 로고
    • Low temperature poly-Si thin-film transistor fabrication by metal-induced lateral crystallization
    • Apr
    • S. W. Lee and S. K. Joo, "Low temperature poly-Si thin-film transistor fabrication by metal-induced lateral crystallization," IEEE Electron Device Lett., vol. 17, no. 4, pp. 160-162, Apr. 1996.
    • (1996) IEEE Electron Device Lett , vol.17 , Issue.4 , pp. 160-162
    • Lee, S.W.1    Joo, S.K.2
  • 9
    • 0033342070 scopus 로고    scopus 로고
    • Single grain thin-film transistors (IFT) with SOI CMOS performance formed by metal-induced-lateral crystallization
    • S. Jagar, M. Chan, M. C. Poon, H. Wang, M. Qin, P. K. Ko, and Y. Wang, "Single grain thin-film transistors (IFT) with SOI CMOS performance formed by metal-induced-lateral crystallization," in IEDM Tech. Dig. 1999, pp. 293-296.
    • (1999) IEDM Tech. Dig , pp. 293-296
    • Jagar, S.1    Chan, M.2    Poon, M.C.3    Wang, H.4    Qin, M.5    Ko, P.K.6    Wang, Y.7
  • 10
    • 0033741132 scopus 로고    scopus 로고
    • Behavior of the drain leakage current in metal-induced laterally crystallized thin film transistors
    • Jul
    • G. A. Bhat, H. S. Kwok, and M. Wong, "Behavior of the drain leakage current in metal-induced laterally crystallized thin film transistors," Solid State Electron., vol. 44, no. 7, pp. 1321-1324, Jul. 2000.
    • (2000) Solid State Electron , vol.44 , Issue.7 , pp. 1321-1324
    • Bhat, G.A.1    Kwok, H.S.2    Wong, M.3
  • 11
    • 0000505794 scopus 로고    scopus 로고
    • Stable microcrystalline silicon thin-film transistors produced by the layer-by-layer technique
    • Dec
    • P. R. Cabarrocas, R. Brenot, P. Bulkin, R. Vanderhaghen, and B. Drevillon, "Stable microcrystalline silicon thin-film transistors produced by the layer-by-layer technique," J. Appl. Phys., vol. 86, no. 12, pp. 7079-7082, Dec. 1999.
    • (1999) J. Appl. Phys , vol.86 , Issue.12 , pp. 7079-7082
    • Cabarrocas, P.R.1    Brenot, R.2    Bulkin, P.3    Vanderhaghen, R.4    Drevillon, B.5
  • 13
    • 0000212153 scopus 로고    scopus 로고
    • Dangling-bond defect state creation in microcrystalline silicon thin-film transistors
    • Jul
    • R. B. Wehrspohn, M. J. Powell, S. C. Deane, I. D. French, and P. R. Cabarrocas, "Dangling-bond defect state creation in microcrystalline silicon thin-film transistors," Appl. Phys. Lett., vol. 77, no. 5, pp. 750-752, Jul. 2000.
    • (2000) Appl. Phys. Lett , vol.77 , Issue.5 , pp. 750-752
    • Wehrspohn, R.B.1    Powell, M.J.2    Deane, S.C.3    French, I.D.4    Cabarrocas, P.R.5
  • 14
    • 0034225426 scopus 로고    scopus 로고
    • Advances in low temperature processing of silicon nitride based dielectrics and their applications in surface passivation and integrated optical devices
    • O. P. Agnihotri, S. C. Jain, J. Poortmans, J. Szlufcik, G. Beaucarne, J. Nijs, and R. Mertens, "Advances in low temperature processing of silicon nitride based dielectrics and their applications in surface passivation and integrated optical devices," Semicond. Sci. Technol. vol. 15, no. 7, pp. R29-R40, 2000.
    • (2000) Semicond. Sci. Technol , vol.15 , Issue.7
    • Agnihotri, O.P.1    Jain, S.C.2    Poortmans, J.3    Szlufcik, J.4    Beaucarne, G.5    Nijs, J.6    Mertens, R.7
  • 16
    • 0032680579 scopus 로고    scopus 로고
    • A new bottom-gated poly-Si thin-film transistor
    • Apr
    • K.-Y. Choi, K.-C. Park, C.-M. Park, and M.-K. Han, "A new bottom-gated poly-Si thin-film transistor," IEEE Electron Device Lett., vol. 20, no. 4, pp. 170-172, Apr. 1999.
    • (1999) IEEE Electron Device Lett , vol.20 , Issue.4 , pp. 170-172
    • Choi, K.-Y.1    Park, K.-C.2    Park, C.-M.3    Han, M.-K.4
  • 17
    • 34247842571 scopus 로고    scopus 로고
    • M. Oudwan, Y. Djeridane, A. Abramov, B. Aventurier, P. Roca i Cabaroccas, and F. Templier, Influence of process steps on the performance of microcrystalline silicon thin film transistors, in Proc. E-MRS Spring Meeting, Nice, France, May 29-Jun. 2, 2006 (to be published in Thin Solid Films).
    • M. Oudwan, Y. Djeridane, A. Abramov, B. Aventurier, P. Roca i Cabaroccas, and F. Templier, "Influence of process steps on the performance of microcrystalline silicon thin film transistors," in Proc. E-MRS Spring Meeting, Nice, France, May 29-Jun. 2, 2006 (to be published in Thin Solid Films).
  • 19
    • 0036564669 scopus 로고    scopus 로고
    • Modeling of the reverse characteristics of a-Si:H TFTs
    • May
    • P. Servati and A. Nathan, "Modeling of the reverse characteristics of a-Si:H TFTs," IEEE Trans. Electron Devices, vol. 49, no. 5, pp. 812-819, May 2002.
    • (2002) IEEE Trans. Electron Devices , vol.49 , Issue.5 , pp. 812-819
    • Servati, P.1    Nathan, A.2
  • 20
    • 0011729186 scopus 로고    scopus 로고
    • Dependence of the leakage current on the film quality in polycrystalline silicon thin-film transistors
    • C. A. Dimitriadis, F. V. Farmakis, J. Brini, and G. Kamarinos, "Dependence of the leakage current on the film quality in polycrystalline silicon thin-film transistors," J. Appl. Phys., vol. 88, no. 5, pp. 2648-2651, 2000.
    • (2000) J. Appl. Phys , vol.88 , Issue.5 , pp. 2648-2651
    • Dimitriadis, C.A.1    Farmakis, F.V.2    Brini, J.3    Kamarinos, G.4
  • 22
    • 0027682123 scopus 로고
    • Gate-induced leakage current in MOS devices
    • V. Nathan and N. C. Das, "Gate-induced leakage current in MOS devices," IEEE Trans. Electron Devices, vol. 40, no. 10, pp. 1888-1890, 1993.
    • (1993) IEEE Trans. Electron Devices , vol.40 , Issue.10 , pp. 1888-1890
    • Nathan, V.1    Das, N.C.2
  • 23
    • 0032066399 scopus 로고    scopus 로고
    • Variation of the exponent of flicker noise in MOSFETs
    • May
    • D. R. Wolters and A. T. A. Zegers Van Duijnhoven, "Variation of the exponent of flicker noise in MOSFETs," Solid State Electron., vol. 42, no. 5, pp. 803-808, May 1998.
    • (1998) Solid State Electron , vol.42 , Issue.5 , pp. 803-808
    • Wolters, D.R.1    Zegers Van Duijnhoven, A.T.A.2
  • 24
    • 0001504828 scopus 로고    scopus 로고
    • Study of leakage current in n-channel and p-channel polycrystalline silicon thin-film transistors by conduction and low frequency noise measurements
    • Oct
    • C. T. Angelis, C. A. Dimitriadis, J. Brini, G. Kamarinos, V. K. Gueorguiev, and T. E. Ivanov, "Study of leakage current in n-channel and p-channel polycrystalline silicon thin-film transistors by conduction and low frequency noise measurements," J. Appl. Phys., vol. 82, no. 8, pp. 4095-4101, Oct. 1997.
    • (1997) J. Appl. Phys , vol.82 , Issue.8 , pp. 4095-4101
    • Angelis, C.T.1    Dimitriadis, C.A.2    Brini, J.3    Kamarinos, G.4    Gueorguiev, V.K.5    Ivanov, T.E.6
  • 26
    • 35949008741 scopus 로고
    • Deep-level-noise spectroscopy of ion-implanted polysilicon thin-films
    • Jul
    • A. J. Madenach and J. Werner, "Deep-level-noise spectroscopy of ion-implanted polysilicon thin-films," Phys. Rev. B, Condens. Matter vol. 38, no. 3, pp. 1958-1962, Jul. 1988.
    • (1988) Phys. Rev. B, Condens. Matter , vol.38 , Issue.3 , pp. 1958-1962
    • Madenach, A.J.1    Werner, J.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.