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Volumn 20, Issue 4, 1999, Pages 170-172

New bottom-gated poly-Si thin-film transistor

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS SILICON; ANNEALING; CHARGE CARRIERS; GATES (TRANSISTOR); LASER APPLICATIONS; LEAKAGE CURRENTS; POLYCRYSTALLINE MATERIALS; SEMICONDUCTING SILICON; SEMICONDUCTOR DEVICE MANUFACTURE; SEMICONDUCTOR DEVICE STRUCTURES;

EID: 0032680579     PISSN: 07413106     EISSN: None     Source Type: Journal    
DOI: 10.1109/55.753756     Document Type: Article
Times cited : (1)

References (7)
  • 1
    • 0024908311 scopus 로고
    • High-performance TFT's fabricated by XeCl excimer laser annealing of hydrogenated amorphous silicon
    • K. Sera, F. Okumura, H. Uchida, S. Itoh, S. Kaneko, and K. Hotta, "High-performance TFT's fabricated by XeCl excimer laser annealing of hydrogenated amorphous silicon," IEEE Trans. Electron Devices, vol. 36, pp. 2868-2872, 1989.
    • (1989) IEEE Trans. Electron Devices , vol.36 , pp. 2868-2872
    • Sera, K.1    Okumura, F.2    Uchida, H.3    Itoh, S.4    Kaneko, S.5    Hotta, K.6
  • 2
    • 0030150105 scopus 로고    scopus 로고
    • Inverse staggered poly-Si and amorphous Si double structure TFT's for LCD panel with peripheral driver circuits integration
    • May
    • T. Aoyama, K. Ogawa, Y. Mochizuki, and N. Konishi, "Inverse staggered poly-Si and amorphous Si double structure TFT's for LCD panel with peripheral driver circuits integration," IEEE Trans. Electron Devices, vol. 43, pp 701-705, May 1996.
    • (1996) IEEE Trans. Electron Devices , vol.43 , pp. 701-705
    • Aoyama, T.1    Ogawa, K.2    Mochizuki, Y.3    Konishi, N.4
  • 3
    • 0029254431 scopus 로고
    • High performance bottom gate TFT's by excimer laser crystallization and post hydrogenation
    • D. P. Gosain, J. Westwater, and S. Usui, "High performance bottom gate TFT's by excimer laser crystallization and post hydrogenation," Jpn. J. Appl. Phys. B, vol 34, no. 2, pp. 937-941, 1995.
    • (1995) Jpn. J. Appl. Phys. B , vol.34 , Issue.2 , pp. 937-941
    • Gosain, D.P.1    Westwater, J.2    Usui, S.3
  • 5
    • 0027702155 scopus 로고
    • Bottom-gate poly-Si thin film transistors using XeCl excimer laser annealing and ion doping techniques
    • Nov.
    • M. Furuta, T. Kawamura, T. Yoshioka, and Y. Miyata, "Bottom-gate poly-Si thin film transistors using XeCl excimer laser annealing and ion doping techniques," IEEE Trans. Electron Devices, vol. 40, pp. 1964-1969, Nov. 1993.
    • (1993) IEEE Trans. Electron Devices , vol.40 , pp. 1964-1969
    • Furuta, M.1    Kawamura, T.2    Yoshioka, T.3    Miyata, Y.4
  • 6
    • 0026259925 scopus 로고
    • Transient temperature profiles in silicon films during pulsed laser annealing
    • K. Shimizu, S. Imai, O. Sugiura, and M. Matsumura, "Transient temperature profiles in silicon films during pulsed laser annealing," Jpn. J. Appl. Phys. A, vol. 30, no. 11, pp. 2664-2672, 1991.
    • (1991) Jpn. J. Appl. Phys. A , vol.30 , Issue.11 , pp. 2664-2672
    • Shimizu, K.1    Imai, S.2    Sugiura, O.3    Matsumura, M.4
  • 7
    • 0030086272 scopus 로고    scopus 로고
    • Hydrogen passivation on the grain boundary and intragranular defects in various polysilicon thin-film transistors
    • K. Y. Choi, J. S. Yoo, M. K. Han, and Y. S. Kim, "Hydrogen passivation on the grain boundary and intragranular defects in various polysilicon thin-film transistors," Jpn. J. Appl. Phys. B, vol. 35, Pt. I, no. 2, pp. 915-918, 1996.
    • (1996) Jpn. J. Appl. Phys. B , vol.35 , Issue.2 PART I , pp. 915-918
    • Choi, K.Y.1    Yoo, J.S.2    Han, M.K.3    Kim, Y.S.4


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.