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Volumn 15, Issue 7, 2000, Pages

Advances in low temperature processing of silicon nitride based dielectrics and their applications in surface passivation and integrated optical devices

Author keywords

[No Author keywords available]

Indexed keywords

DEPOSITION; INTEGRATED OPTOELECTRONICS; MICROELECTRONICS; PASSIVATION; SILICON NITRIDE; WAVEGUIDES;

EID: 0034225426     PISSN: 02681242     EISSN: None     Source Type: Journal    
DOI: 10.1088/0268-1242/15/7/201     Document Type: Article
Times cited : (38)

References (109)
  • 2
    • 0032316962 scopus 로고    scopus 로고
    • Yue Kuo 1998 Vacuum 51 741
    • (1998) Vacuum , vol.51 , pp. 741
    • Yue, K.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.