An investigation of laser annealed and metal-induced crystallized polycrystalline silicon thin-film transistors

IEEE Transactions on Electron Devices

Volumn 48, Issue 6, 2001, Pages 1145-1149

  Murley, D ^a   Young, N ^a   Trainor, M ^a   McCulloch, D ^a  

^a PHILIPS RESEARCH LABORATORIES   (Netherlands)

Author keywords

AMLCD; Laser annealing; LTPS; Polysilicon; Thin film transistors (TFTs)

Indexed keywords

AMORPHOUS SILICON; ANNEALING; EXCIMER LASERS; GATES (TRANSISTOR); LEAKAGE CURRENTS; NICKEL; POLYSILICON; SEMICONDUCTOR DOPING; SEMICONDUCTOR JUNCTIONS; THRESHOLD VOLTAGE;

METAL-INDUCED LATERAL CRYSTALLIZATION (MILC);

THIN FILM TRANSISTORS;

EID: 0035366275     PISSN: 00189383     EISSN: None     Source Type: Journal    
DOI: 10.1109/16.925240     Document Type: Article

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