Stable microcrystalline silicon thin-film transistors produced by the layer-by-layer technique

Journal of Applied Physics

Volumn 86, Issue 12, 1999, Pages 7079-7082

  Roca I Cabarrocas, P ^a   Brenot, R ^a   Bulkin, P ^a   Vanderhaghen, R ^a   Drevillon B ^a   French, I ^b  

^a LABORATOIRE DE PHYSIQUE DES INTERFACES ET DES COUCHES MINCES   (France)

^b PHILIPS RESEARCH LABORATORIES   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000505794     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.371795     Document Type: Article

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