Development of various designs of low-power, MEMS valves for fluidic applications

Sensors and Actuators, A: Physical

Volumn 136, Issue 1, 2007, Pages 374-384

  Cardenas Valencia, A M ^a   Dlutowski, J ^a,b   Bumgarner, J ^a   Munoz, C ^a,b   Wang, W ^a   Popuri, R ^a   Langebrake, L ^a  

^a UNIVERSITY OF SOUTH FLORIDA   (United States)

^b University of South Florida   (United States)

Author keywords

Micro valves; Single use; Thermally actuated

Indexed keywords

ACTIVATION ENERGY; MEMS; MICROFLUIDICS; RESISTORS; SILICON WAFERS; THERMAL STRESS;

FLOW BARRIERS; METALLIC OHMIC RESISTORS; MICROVALVES; RAPID HEATING;

VALVES (MECHANICAL);

EID: 34247173325     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2006.12.016     Document Type: Article

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