Design and fabrication of MEMS-based micropropulsion devices at JPL

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4558, Issue , 2001, Pages 57-71

  Mueller, Juergen ^a   Yang, Eui Hyeok ^a   Green, Amanda ^a   White, Victor ^a   Chakraborty, Indrani ^b   Reinicke, Robert ^c  

^a CALIFORNIA INSTITUTE OF TECHNOLOGY   (United States)

^b Siwave Corp   (United States)

^c Moog Space Products Division   (United States)

Author keywords

Microfabrication; Micropropulsion; Microspacecraft; Microvalves

Indexed keywords

ELECTRIC POTENTIAL; OPTICAL DESIGN; OPTICAL FIBER FABRICATION; OPTICAL TESTING; PIEZOELECTRIC MATERIALS; SPACECRAFT PROPULSION;

MICROPROPULSION DEVICES;

MICROELECTROMECHANICAL DEVICES;

EID: 0035763378     PISSN: 0277786X     EISSN: None     Source Type: Journal    
DOI: 10.1117/12.443018     Document Type: Article

References (12)

1. rd International Symposium of the International Academy of Astronautics (IAA) for Small Satellites for Earth Observation, Berlin, Germany, April 2-6, 2001, to be published in Acta Astronautica, December 2001.
2. Mueller, J., "Thruster Options for Microspacecraft: A Review and Evaluation of State-of-the-Art and Emerging Technologies", Micropropulsion for Small Spacecraft, Progress in Astronautics and Aeronautics, Vol. 187, edited by Micci, M. and Ketsdever, A., AIAA, Reston, VA, 2000, Chap. 3.
3. th Joint Propulsion Conference, Huntsville, AL, July 16-19, 2000.
4. th Joint Propulsion Conference, Salt Lake City, Utah, July 8-11, 2001.
5. Mueller, J., Chakraborty, I., Bame, D., and Tang, W., "The Vaporizing Liquid Micro-Thruster Concept: Preliminary Results of Initial Feasibility Studies", Micropropulsion for Small Spacecraft, Progress in Astronautics and Aeronautics, Vol. 187, edited by Micci, M. and Ketsdever, A., AIAA, Reston, VA, 2000, Chap. 8.
6. Cubbin, E.A., Ziemer, J.K., Choueiri, E.Y., and Jahn, R.G., "Pulsed Thrust Measurements using Laser Interferometry", Rev. Sci. Instrum., 68 (6), pp. 2339 - 2346, June 1997.
7. Mueller, J., "A Review and Applicability Assessment of MEMS-Based Microvalve Technologies for Microspacecraft Propulsion", Micropropulsion for Small Spacecraft, Progress in Astronautics and Aeronautics, Vol. 187, edited by Micci, M. and Ketsdever, A., AIAA, Reston, VA, 2000, Chap. 19.
8. Vargo, S., Green, A., Mueller, J., Bame, D., and Reinicke, R., "Characterization of Kovar-Pyrex anodically bonded samples - a new packaging approach for MEMS devices", SPIE 2000 Symposium on Micromachining and Microfabrication, Santa Clara, CA, Sept. 18-19, 2000.
9. th Joint Propulsion Conference, Los Angeles, CA, June 20-24, 1999.
10. Mueller, J., Vargo, S., Bame, D., Chakraborty, I., and Tang, W., "The Micro-Isolation Valve Concept: Initial Results of a Feasibility Study", Micropropulsion for Small Spacecraft, Progress in Astronautics and Aeronautics, Vol. 187, edited by Micci, M. and Ketsdever, A., AIAA, Reston, VA, 2000, Chap. 17.
11. th Joint Propulsion Conference, Huntsville, AL, July 16-19, 2000.
12. Bhardwaj, J. and Ashraf, H., "Advanced Silicon Etching Using High Density Plasmas". Micromachining and Microfabrication Process Technology - SPIE, 2639, 224-233, 1995.