Theoretical and experimental study of silicon micromachined microheater with dielectric stacked membranes

Sensors and Actuators, A: Physical

Volumn 63, Issue 3, 1997, Pages 183-189

  Rossi, Carole ^a   Scheid, Emmanuel ^a   Estève, Daniel ^a  

^a LAAS CNRS   (France)

Author keywords

Dielectric membranes; Microheaters; Thermal optimization

Indexed keywords

COMPUTER SIMULATION; DIELECTRIC MATERIALS; FABRICATION; HEATING; HEATING EQUIPMENT; MEMBRANES; OPTIMIZATION;

DIELECTRIC STACKED MEMBRANES; MECHANICAL BREAKDOWN; SILICON MICROMACHINED MICROHEATER; THERMAL OPTIMIZATION;

SILICON SENSORS;

EID: 0031358060     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(97)80503-1     Document Type: Article

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