Process development and fabrication of application specific micro-valves

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4174, Issue 1, 2000, Pages 299-306

  Xu, Bai ^a   Castracane, James ^a   Geer, Robert ^a   Yao, Yahong ^a   Altemus, Brace ^a  

^a STATE UNIVERSITY OF NEW YORK   (United States)

Author keywords

Electrostatic valves; MEMS; Micro valves; Silicon Bulk Micromachining; Silicon Surface Micromachining

Indexed keywords

COSTS; ELECTROSTATICS; MICROELECTROMECHANICAL DEVICES; MICROPROCESSOR CHIPS; SEMICONDUCTING SILICON;

ELECTROSTATIC VALVES; MICROVALVES; SILICON SURFACE MICROMACHINING;

MICROMACHINING;

EID: 0034538633     PISSN: 0277786X     EISSN: None     Source Type: Journal    
DOI: 10.1117/12.396446     Document Type: Article

References (0)