Structure and characterization of a planar normally closed bulk-micromachined piezoelectric valve for fuel cell applications

Sensors and Actuators, A: Physical

Volumn 120, Issue 1, 2005, Pages 134-141

  Zhao, Hengbing ^a   Stanley, Kevin ^a   Wu, Q M Jonathan ^b   Czyzewska, Eva ^a  

^a NATIONAL RESEARCH COUNCIL CANADA   (Canada)

^b UNIVERSITY OF WINDSOR   (Canada)

Author keywords

Bulk micromachining; Fuel cell system; Microvalve; Piezoelectric

Indexed keywords

BULK-MICROMACHINING; FUEL CELL SYSTEMS; GEOMETRIC CONSTRAINTS; MICROVALVES;

DIAPHRAGMS; FINITE ELEMENT METHOD; FUEL CELLS; MACHINE DESIGN; MICROMACHINING; PIEZOELECTRIC DEVICES; SILICON WAFERS; THERMAL EXPANSION; THERMODYNAMIC STABILITY;

VALVES (MECHANICAL);

EID: 17444417814     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2004.11.037     Document Type: Article

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