Rapid design, fabrication and optimization of a single event thermo-pneumatic microactuation for the delivery of minute amounts of liquids

International Conference on Microchannels and Minichannels

Volumn 1, Issue , 2003, Pages 801-808

  Cardenas Valencia, Andres M ^a   Fries, David P ^a   Langebrake, Larry C ^a   Benson, Robert F ^a  

^a Center for Ocean Technology   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CLADDING (COATING); COPPER; ELECTRIC CURRENTS; ENERGY UTILIZATION; HEATING; MICROACTUATORS; MICROELECTROMECHANICAL DEVICES; OPTIMIZATION; PNEUMATIC CONTROL EQUIPMENT; POLYMERS; PRESSURE EFFECTS; RESISTORS; THERMAL EXPANSION; TRANSPORT PROPERTIES; VAPORIZATION; WORKING FLUID PRESSURE INDICATORS;

DESIGN-FABRICATION PROTOCOL; FLUID EXPANSION; MICRO-OHMIC HEATERS; THERMO-PNEUMATIC MICROACTUATION;

FLOW OF FLUIDS;

EID: 1242308983     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1115/icmm2003-1105     Document Type: Conference Paper

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