Modeling and fabrication of capillary stop valves for planar microfluidic systems

Sensors and Actuators, A: Physical

Volumn 130-131, Issue SPEC. ISS., 2006, Pages 601-608

  Glière, Alain ^a   Delattre, Cyril ^a  

^a CEA LETI   (France)

Author keywords

Capillary stop valves; Deep Reactive Ion Etching; Finite Element Method; Microfluidics; Modeling

Indexed keywords

FABRICATION; FLUID MECHANICS; PROBLEM SOLVING; REACTIVE ION ETCHING; SURFACE ACTIVE AGENTS; SURFACE PROPERTIES;

CAPILLARY STOP VALVES; DEEP REACTIVE ION ETCHING; MICROFLUIDICS; MODELING;

CAPILLARY FLOW;

EID: 33745821180     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2005.12.011     Document Type: Article

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