Electrolyte-based on-demand and disposable microbattery

Journal of Microelectromechanical Systems

Volumn 12, Issue 6, 2003, Pages 840-847

  Lee, Ki Bang ^a   Lin, Liwei ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

Battery; Disposable micropower; MEMS; Micromachines; Microsystems

Indexed keywords

DISPOSABILITY; ELECTRIC BATTERIES; ELECTROCHEMICAL ELECTRODES; ELECTROLYTES; GOLD; HYDROGEN PEROXIDE; MICROMACHINING; SULFURIC ACID; SYSTEMS ANALYSIS; ZINC;

DISPOSABLE MIPOWER; MICROBATTERY THEORY; MICROSYSTEMS; POTASSIUM HYDROXIDE;

MICROELECTROMECHANICAL DEVICES;

EID: 0742269326     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2003.820272     Document Type: Article

References (18)

1. A. H. Epstein and S. D. Senturia, "Micro power from micro machinery," Science, vol. 276, p. 1211, May 1997.
2. A. H. Epstein et al., "Power MEMS and microengines," in Proc. 9th International Conference on Solid-State Sensors and Actuators, Chicago, IL, 1997, pp. 753-756.
3. A. Mehra, X. Zhang, Arturo, A. Ayon, I. A. Waitz, M. A. Schmidt, and C. M. Spadaccini, "A six-wafer combustion system for a silicon micro gas turbine engine," J. Microelectromech. Syst., vol. 9, pp. 517-527, Dec. 2000.
4. J. R. Webster, M. A. Burke, and C. H. Mastrangelo, "Electrophoresis system with integrated on-chip fluorescence detection," in Proc. Micro Electro Mechanical Systems Workshop, 2000, pp. 306-310.
5. K. B. Lee and Y.-H. Cho, "Laterally driven electro-static repulsive-force microactuators using asymmetric field distribution," J. Microelectromech. Syst., vol. 10, pp. 128-136, Feb. 2001.
6. B. Warneke, M. Last, B. Liebowitz, and K. S. J. Pister, "Smart dust: Communicating with a cubic-millimeter computer," IEEE Computer, vol. 34, no. 1, pp. 44-51, 2001.
7. J. B. Lee, Z. Chen, M. G. Allen, and A. Rohatgi, "A miniaturized high-voltage solar cell array as an electrostatic MEMS power supply," J. Microelectromech. Syst., vol. 4, pp. 102-108, Sept. 1995.
8. R. M. LaFollette, J. N. Harb, L. G. Salmon, and D. M. Ryan, "The performance of microscopic batteries developed for MEMS applications," in 33rd Intersociety Engineering Conference, Colorado Springs, CO, 1998, Paper IECEC-98-117.
9. L. G. Salmon, R. A. Barksdale, and B. R. Beachem, "Development of rechargable microbatteries for autonomous MEMS applications," in Proc. Solid-State Sensor and Actuator Workshop, Hilton Head Island, SC, June 8-11, 1998, pp. 338-341.
10. S. D. Jones and J. R. Akridge, "Development and performance of a rechargeable thin-film solid-state microbattery," J. Power Sources, vol. 54, pp. 63-67, 1995.
11. W. C. West, J. F. Whitacre, V. White, and B. V. Ratnakumar, "Fabrication and testing of all solid-state microscale lithium batteries for microspace-craft applications," J. Micromech. Microeng., vol. 12, pp. 58-62, 2002.
12. L. David, Handbook of Batteries, 2nd ed. New York: McGraw-Hill, 1995.
13. P. W. Atkins, General Chemistry, New York: Scientific American Books, 1989.
14. D. A. Koester, R. Mahadevan, B. Hardy, and K. W. Markus, "MUMP's design handbook," in Revision 6.0, Cronos Integrated Microsystems A JDS Uniphase Company, 2001.
15. K. B. Lee and L. Lin, "Zinc bonding for MEMS packaging at the waterlevel," in Proc. 2001 ASME International Mechanical Engineering Congress and Exposition, Nov. 11-16, 2001.
16. W. Gilbert, Castellan, Physical Chemistry, 3rd ed. Reading, MA: Addision-Wesley, 1983.
17. Y. C. Su and L. Lin, "Localized plastic bonding for micro assembly packaging and liquid encapsulation," in Proc. IEEE Micro Electro Mechanical Systems Conference, Interlaken, Switzerland, Jan. 2001, pp. 50-53.
18. K. B. Lee, F. Sammoura, and L. Lin, "Water activated disposable and long shelf life microbatteries," in Proc. IEEE Micro Electro Mechanical Systems Conference, Kyoto, Japan, Jan. 2003, pp. 387-390.