MEMS-based Humidity Sensors with Integrated Temperature Sensors for Signal Drift Compensation

Proceedings of IEEE Sensors

Volumn 2, Issue 1, 2003, Pages 384-388

  Lee, Chia Yen ^a   Lee, Gwo Bin ^a  

^a NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

Author keywords

Humidity sensor; MEMS; Microcantilever; Polyimide; Temperature sensor

Indexed keywords

ATMOSPHERIC HUMIDITY; COMPUTER SIMULATION; ELECTRODES; GLASS; MICROELECTROMECHANICAL DEVICES; MICROSTRUCTURE; MOISTURE; POLYIMIDES; RESISTORS; THIN FILMS;

HUMIDITY SENSORS; MICROCANTILEVERS; SIGNAL DRIFT COMPENSATION; TEMPERATURE SENSORS;

SENSORS;

EID: 1542303750     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)

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3. Rittersma Z. M., "Recent achievements in miniaturized humidity sensors - a review of transduction techniques", Sensors and Actuators A: Physical 96 196-210 (2002).
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6. Lee C. Y., et al., "MEMS-based temperature control system for PCR applications", The International Journal of Non-linear Sciences and Numerical Simulations 3(4) 215-218 (2002).