Thermal conduction in ultrathin pure and doped single-crystal silicon layers at high temperatures

Journal of Applied Physics

Volumn 98, Issue 12, 2005, Pages

  Liu, Wenjun ^a,b   Asheghi, Mehdi ^a  

^a CARNEGIE MELLON UNIVERSITY   (United States)

^b University of Notre Dame   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

JOULE HEATING; PHONON-IMPURITY SCATTERING; RELAXATION-TIME APPROXIMATION; SILICON LAYERS;

ELECTRIC RESISTANCE; SEMICONDUCTOR DOPING; SINGLE CRYSTALS; THERMAL CONDUCTIVITY; THERMAL EFFECTS;

SEMICONDUCTING SILICON;

EID: 29744446243     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2149497     Document Type: Review

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